JPS62198269U - - Google Patents

Info

Publication number
JPS62198269U
JPS62198269U JP8638186U JP8638186U JPS62198269U JP S62198269 U JPS62198269 U JP S62198269U JP 8638186 U JP8638186 U JP 8638186U JP 8638186 U JP8638186 U JP 8638186U JP S62198269 U JPS62198269 U JP S62198269U
Authority
JP
Japan
Prior art keywords
sputter target
sintered body
powder sintered
densifying
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8638186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8638186U priority Critical patent/JPS62198269U/ja
Publication of JPS62198269U publication Critical patent/JPS62198269U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8638186U 1986-06-06 1986-06-06 Pending JPS62198269U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8638186U JPS62198269U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8638186U JPS62198269U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Publications (1)

Publication Number Publication Date
JPS62198269U true JPS62198269U (enrdf_load_stackoverflow) 1987-12-17

Family

ID=30942632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8638186U Pending JPS62198269U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Country Status (1)

Country Link
JP (1) JPS62198269U (enrdf_load_stackoverflow)

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