JPS62198266U - - Google Patents

Info

Publication number

JPS62198266U

JPS62198266U JP8818286U JP8818286U JPS62198266U JP S62198266 U JPS62198266 U JP S62198266U JP 8818286 U JP8818286 U JP 8818286U JP 8818286 U JP8818286 U JP 8818286U JP S62198266 U JPS62198266 U JP S62198266U

Authority

JP

Japan

Prior art keywords

evaporation source

shielding plate

evaporation

plate

melting

Prior art date

1986-06-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 13
• 238000001704 evaporation Methods 0.000 claims description 13
• 238000007738 vacuum evaporation Methods 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 3
• 230000008018 melting Effects 0.000 claims 3
• 238000002844 melting Methods 0.000 claims 3
• 230000008021 deposition Effects 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000000155 melt Substances 0.000 claims 2
• 239000000126 substance Substances 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1
• 238000001771 vacuum deposition Methods 0.000 description 1