JPS62198094U - - Google Patents
Info
- Publication number
- JPS62198094U JPS62198094U JP8590486U JP8590486U JPS62198094U JP S62198094 U JPS62198094 U JP S62198094U JP 8590486 U JP8590486 U JP 8590486U JP 8590486 U JP8590486 U JP 8590486U JP S62198094 U JPS62198094 U JP S62198094U
- Authority
- JP
- Japan
- Prior art keywords
- glove
- wafer processing
- hole
- processing box
- subchamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920005549 butyl rubber Polymers 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8590486U JPS62198094U (sv) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8590486U JPS62198094U (sv) | 1986-06-05 | 1986-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198094U true JPS62198094U (sv) | 1987-12-16 |
Family
ID=30941731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8590486U Pending JPS62198094U (sv) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198094U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0270009A (ja) * | 1988-09-02 | 1990-03-08 | Ishikawajima Harima Heavy Ind Co Ltd | 活性金属の高純度微粉末製造装置 |
-
1986
- 1986-06-05 JP JP8590486U patent/JPS62198094U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0270009A (ja) * | 1988-09-02 | 1990-03-08 | Ishikawajima Harima Heavy Ind Co Ltd | 活性金属の高純度微粉末製造装置 |