JPS62198043U - - Google Patents

Info

Publication number
JPS62198043U
JPS62198043U JP8719386U JP8719386U JPS62198043U JP S62198043 U JPS62198043 U JP S62198043U JP 8719386 U JP8719386 U JP 8719386U JP 8719386 U JP8719386 U JP 8719386U JP S62198043 U JPS62198043 U JP S62198043U
Authority
JP
Japan
Prior art keywords
air
pipe material
workpiece
cleaning liquid
setting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8719386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8719386U priority Critical patent/JPS62198043U/ja
Publication of JPS62198043U publication Critical patent/JPS62198043U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP8719386U 1986-06-10 1986-06-10 Pending JPS62198043U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8719386U JPS62198043U (US06330241-20011211-M00004.png) 1986-06-10 1986-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8719386U JPS62198043U (US06330241-20011211-M00004.png) 1986-06-10 1986-06-10

Publications (1)

Publication Number Publication Date
JPS62198043U true JPS62198043U (US06330241-20011211-M00004.png) 1987-12-16

Family

ID=30944193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8719386U Pending JPS62198043U (US06330241-20011211-M00004.png) 1986-06-10 1986-06-10

Country Status (1)

Country Link
JP (1) JPS62198043U (US06330241-20011211-M00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022527664A (ja) * 2019-05-08 2022-06-02 北京北方華創微電子装備有限公司 クリーニング・チャンバおよびクリーニング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022527664A (ja) * 2019-05-08 2022-06-02 北京北方華創微電子装備有限公司 クリーニング・チャンバおよびクリーニング装置

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