JPS62197939A - Photomagnetic recording medium - Google Patents
Photomagnetic recording mediumInfo
- Publication number
- JPS62197939A JPS62197939A JP3870686A JP3870686A JPS62197939A JP S62197939 A JPS62197939 A JP S62197939A JP 3870686 A JP3870686 A JP 3870686A JP 3870686 A JP3870686 A JP 3870686A JP S62197939 A JPS62197939 A JP S62197939A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magneto
- optical recording
- corrosion resistance
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims abstract description 57
- 239000011241 protective layer Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 229910020517 Co—Ti Inorganic materials 0.000 claims abstract description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910018516 Al—O Inorganic materials 0.000 claims abstract description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 229910018509 Al—N Inorganic materials 0.000 claims abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000001301 oxygen Substances 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- 229910002795 Si–Al–O–N Inorganic materials 0.000 claims abstract 2
- 239000010936 titanium Substances 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 229910017052 cobalt Inorganic materials 0.000 claims description 9
- 239000010941 cobalt Substances 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 8
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910017061 Fe Co Inorganic materials 0.000 claims 1
- 229910002800 Si–O–Al Inorganic materials 0.000 claims 1
- 229910006283 Si—O—H Inorganic materials 0.000 claims 1
- 230000007797 corrosion Effects 0.000 abstract description 32
- 238000005260 corrosion Methods 0.000 abstract description 32
- 239000000463 material Substances 0.000 abstract description 8
- 229910018514 Al—O—N Inorganic materials 0.000 abstract 1
- 229910006360 Si—O—N Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910002796 Si–Al Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005580 one pot reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光学的記録媒体における光磁気記録用媒体に関
するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magneto-optical recording medium in an optical recording medium.
（従来の技術）
従来、このような分野の技術としては、特開昭５２−３
１７０３号公報、および特開昭５２−１０９１９３号公
報に記載されるものがあった。以下、その構成を説明す
る。(Prior art) Conventionally, as a technology in this field, Japanese Patent Application Laid-Open No. 52-3
There were those described in Japanese Patent Application Laid-open No. 1703 and Japanese Patent Application Laid-open No. 109193/1983. The configuration will be explained below.
従来の光磁気記録用媒体は、希土類−遷移金属系合金の
非晶質層（以下、ＲＥ−７８層という）からなる光磁気
記録層を、基板上に形成した構造をしている。A conventional magneto-optical recording medium has a structure in which a magneto-optical recording layer consisting of an amorphous layer of a rare earth-transition metal alloy (hereinafter referred to as RE-78 layer) is formed on a substrate.
ここで、ＲＥ−７８層は、具体的にはＲＥとしてガドリ
ニウムＧｄ、テルビウムＴｂ、ジスプロシウムａｙ等、
ＴＭとし鉄ＦｅまたはコバルトＣｏを主成分としている
。このＲＥ−７８層は層面に対して垂直な磁化をもつ、
いわゆる垂直磁化膜である。Here, the RE-78 layer specifically contains gadolinium Gd, terbium Tb, dysprosium ay, etc. as RE.
The main component is iron (Fe) or cobalt (Co). This RE-78 layer has magnetization perpendicular to the layer plane.
This is a so-called perpendicular magnetization film.
このようなＲＥ−７８層を用いた光磁気記録用媒体は、
１鉢層φ程度に絞られたレーザビーム及び外部磁界を用
いた熱磁気書込み方式によって１０８ｂｉｔ／ｃ＋ｗ２
というきわめて高密度な記録が可能で、しかも原理的
には無限回に近い消去および再書込みができるという非
常に優れた特長を有する。A magneto-optical recording medium using such an RE-78 layer is
108bit/c+w2 by a thermomagnetic writing method using a laser beam narrowed down to about one pot layer φ and an external magnetic field.
It has the excellent feature of being capable of extremely high-density recording and, in principle, being able to erase and rewrite nearly an infinite number of times.
ＲＥ−７Ｍ層には大きく分けてＲＥ−鉄系とＲＥ−コバ
ルト系に分類される。The RE-7M layer is broadly classified into RE-iron type and RE-cobalt type.
ＲＥ−鉄系は、優れた磁気および光磁気特性を有し、し
かも特性の分布が均一な膜もつくりやすい０反面、耐食
性が非常に悪く、特に孔食の発生、発達が顕著であると
いう欠点を持っている。RE-iron has excellent magnetic and magneto-optical properties, and it is easy to form films with uniform distribution of properties, but on the other hand, it has very poor corrosion resistance, with the disadvantage that pitting corrosion is particularly noticeable. have.
一方、ＲＥ−コバルト系は、耐食性の点では優れている
が、均一特性の膜が得にくく、またキュリ一点が高いた
めに熱磁気書込み特性の点で。On the other hand, the RE-cobalt type is excellent in terms of corrosion resistance, but it is difficult to obtain a film with uniform characteristics, and the Curie point is high, so it has poor thermomagnetic writing characteristics.
ＲＥ−鉄系よりも劣っている。RE - Inferior to iron-based.
ＲＥ−鉄系に少量のＣｏを添加することで、耐食性およ
び磁気・光磁気特性の両方を改善できることはよく知ら
れている。ところが、Ｃｏ添加はキュリ一点の急上昇を
ひきおこし、Ｃｏの過度の添加は熱磁気書込みを困難に
するため、少量しか添加できない、少量のＣｏを添加し
たＲＥ−鉄一コバルト層は、磁気および光磁気特性にお
いてＲＥ−鉄系およびＲＥ−コバルト系層のいずれより
も優れている。It is well known that by adding a small amount of Co to the RE-iron system, both corrosion resistance and magnetic/magneto-optical properties can be improved. However, the addition of Co causes a sharp increase in temperature by a single point, and excessive addition of Co makes thermomagnetic writing difficult, so only a small amount can be added.Re-iron-cobalt layers with a small amount of Co added are not suitable for magnetic and magneto-optical writing. It is superior in properties to both the RE-iron layer and the RE-cobalt layer.
その反面、耐食性に対してはＲＥ−鉄系よりも若干改善
されるものの、未だ不充分である。On the other hand, although the corrosion resistance is slightly improved over the RE-iron system, it is still insufficient.
そこで従来、 ＲＥ−７Ｍ層を保護層で被覆（コート）
シたり、あるいはＲＥ−７Ｍ層の材質の改良により、耐
食性の改善が試みられている。Therefore, conventionally, the RE-7M layer was coated with a protective layer.
Attempts have been made to improve corrosion resistance by improving the material of the RE-7M layer.
（発明が解決しようとする問題点）
しかしながら、従来の光磁気記録用媒体では、次のよう
な問題点があった。(Problems to be Solved by the Invention) However, conventional magneto-optical recording media have the following problems.
ＲＥ−鉄一コバルト層は、光磁気材料として優れた特性
を有するものの、耐食性が悪く、それを防ぐために保護
層で被覆する方法が採用されている。Although the RE-iron-cobalt layer has excellent properties as a magneto-optical material, it has poor corrosion resistance, and to prevent this, a method of covering it with a protective layer is adopted.
ところが、十分な保護性のある保護層の形成は容易では
ない０例えば、膜厚６００人のＲＥ−鉄一コバルト層を
１０００人厚の二酸化ケイ素Ｓｉ０２または酸化ケイ素
ＳｉＯのスパッタ膜で被覆した場合、８５℃、８５％相
対湿度での３時間エイジング（ａｇｅｉｎｇ、保持）で
、多数の孔食が発生してしまう、同様に、ＲＥ−鉄一コ
バルト層を２ル■厚のポリマー（ＰＭＭＡ、 ポリカー
ボネート、ポリスチレン等の重合体）で被覆しても、８
５℃、８５％相対湿度での５時間エイジングで、多数の
孔食が発生してしまう、また、仮に特性の良い保護層が
存在したとしても、ＲＥ−ＴＭ 膜を完全に保護するこ
とは困難であり、どうしても孔食発生の危険性は消えな
い。However, it is not easy to form a protective layer with sufficient protective properties. For example, when a 600-layer thick RE-iron-cobalt layer is coated with a 1000-layer thick sputtered film of silicon dioxide (Si02) or silicon oxide (SiO), Aging (holding) for 3 hours at 85°C and 85% relative humidity will result in a large amount of pitting corrosion. Even if coated with a polymer such as polystyrene, the
Aging for 5 hours at 5°C and 85% relative humidity causes a lot of pitting corrosion, and even if a protective layer with good properties exists, it is difficult to completely protect the RE-TM film. Therefore, the risk of pitting corrosion cannot be eliminated.
耐食性を改善する他の方法としてＲＥ−ＴＭ層自体の耐
食性を改善することも行われている。Another method of improving corrosion resistance is to improve the corrosion resistance of the RE-TM layer itself.
ＲＥ−７Ｍ層の耐食性を著しく改善するような添加元素
はかなり見つかっているが、その多くのものはＲＥ−７
Ｍ層の耐食性を改善する一方で、磁気・光磁気特性を著
しく劣化させる。また、耐食性は大幅に改善されても、
機械的なダメージを除去できない。そのため、保護層の
併用が必要である。Many additive elements have been found that significantly improve the corrosion resistance of the RE-7M layer, but many of them
While improving the corrosion resistance of the M layer, it significantly deteriorates the magnetic and magneto-optical properties. In addition, even though corrosion resistance has been significantly improved,
Mechanical damage cannot be removed. Therefore, it is necessary to use a protective layer in combination.
本発明は、前記従来技術が持っていた問題点として、十
分な耐食性と優れた光磁気特性を持った光磁気記録用媒
体を得ることが困難である点について解決した光磁気記
録用媒体を提供するものである。The present invention provides a magneto-optical recording medium that solves the problem of the prior art, which is that it is difficult to obtain a magneto-optical recording medium with sufficient corrosion resistance and excellent magneto-optical properties. It is something to do.
（問題点を解決するための手段）
本発明は前記問題点を解決するために、基板上に少なく
とも光磁気記録層を形成すると共にその光磁気記録層を
保護する保護層を形成した光磁気記録用媒体において、
前記光磁気記録層及び保護層を次のような材料で構成す
る。すなわち、光磁気記録層は、ＲＥ−Ｆｅ−Ｃｏ−Ｔ
ｉ系合金で形成し、さらに前記ＲＥは前記ＲＥ−Ｆｅ−
Ｃｏ−Ｔｉ系合金における全体量の１８〜３５原子％量
を持った希土類元素、または２種以上の希土類元素の合
金で、前記Ｆｅは鉄で、前記Ｃｏは前記全体量の０〜２
０原子％量を持ったコバルトで、前記Ｔｉは前記Ｆｅ−
Ｃｏ−Ｔｉ全体量における２〜１５原子％量を持ったチ
タンで、それぞれ構成する。また、保護層は、ケイ素Ｓ
ｉ、アルミニウムＡｑ、酸素Ｏ、チッ素ＮからなるＳｉ
−Ａｌ −Ｈ、Ｓｉ−Ａｌ−Ｏ、Ｓｉ−Ａｌ−０−Ｈ、
Ｓｉ−０−Ｈ、またはＡｌ−０−Ｎのいずれかの共有
結合で構成したものである。(Means for Solving the Problems) In order to solve the above-mentioned problems, the present invention provides a magneto-optical recording device in which at least a magneto-optical recording layer is formed on a substrate and a protective layer is formed to protect the magneto-optical recording layer. In the medium for
The magneto-optical recording layer and the protective layer are made of the following materials. That is, the magneto-optical recording layer is made of RE-Fe-Co-T
The RE is formed of an i-based alloy, and the RE is formed of the RE-Fe-
A rare earth element having an amount of 18 to 35 at% of the total amount in a Co-Ti alloy, or an alloy of two or more rare earth elements, wherein the Fe is iron and the Co is 0 to 2 of the total amount.
Cobalt has an amount of 0 atomic %, and the Ti is
Each is composed of titanium having an amount of 2 to 15 atomic % based on the total amount of Co--Ti. In addition, the protective layer is silicon S
i, Si consisting of aluminum Aq, oxygen O, and nitrogen N
-Al-H, Si-Al-O, Si-Al-0-H,
It is composed of covalent bonds of either Si-0-H or Al-0-N.
（作 用）
本発明によれば、以上のように光磁気記録用媒体を構成
したので、ＲＥ−Ｆｅ−ｃｏ−Ｔｉ系合金からなる光磁
気記録層は、高耐食性と優れた光磁気特性を持つ、しか
も、Ｓｉ−Ａｌ−Ｎ等からなる保護層は、光磁気記録層
を機械的なダメージから、さらに外気、水分、油に直接
さらされることからそれぞれ保護すると共に、孔りの発
生、成長を抑制し、かつ保磁力の変化を抑制するための
十分な機能を有している。これらの光磁気記録層及び保
護層により、耐食性と光磁気特性の向上が計れる。従っ
て前記問題点を除去できるのである。(Function) According to the present invention, since the magneto-optical recording medium is constructed as described above, the magneto-optical recording layer made of the RE-Fe-co-Ti alloy has high corrosion resistance and excellent magneto-optical properties. Moreover, the protective layer made of Si-Al-N etc. protects the magneto-optical recording layer from mechanical damage and direct exposure to outside air, moisture, and oil, and prevents the formation and growth of pores. It has a sufficient function to suppress changes in coercive force and suppress changes in coercive force. These magneto-optical recording layers and protective layers can improve corrosion resistance and magneto-optical properties. Therefore, the above-mentioned problem can be eliminated.
（実施例）
第１図は本発明の実施例を示す光磁気記録用媒体の概略
断面図である。(Example) FIG. 1 is a schematic cross-sectional view of a magneto-optical recording medium showing an example of the present invention.
この光磁気記録用媒体は、透明度が高くかつ光学特性の
良いガラス板、あるいは樹脂板からなる基板１を有し、
その基板ｌ上には、保護層２゜ＲＥ−Ｔ）１層からなる
光磁気記録Ｍ３、及び保護層４が、順次積層状態に形成
されている。This magneto-optical recording medium has a substrate 1 made of a glass plate or a resin plate with high transparency and good optical properties,
On the substrate 1, a magneto-optical recording M3 consisting of one protective layer 2°RE-T) and a protective layer 4 are sequentially formed in a laminated state.
保護層２，４は、光磁気記録層３に対する保護とカー効
果エンハンスメントの働きを合せ持つもので、例えば膜
厚１０００λの次のような材質で形成される。すなわち
、該保護層２，４は、Ｓｉ、Ａ Ｑ、、ＯｌＮからなる
Ｓｉ−Ａｌ −Ｈ、 Ｓｉ−Ａｌ −Ｏ、Ｓｉ−Ａｌ
−０−Ｈ、 Ｓｉ−０−Ｈ、またはＡ晩−〇−Ｈの共有
結合で構成される。The protective layers 2 and 4 have the functions of protecting the magneto-optical recording layer 3 and enhancing the Kerr effect, and are formed of the following materials with a thickness of 1000λ, for example. That is, the protective layers 2 and 4 include Si-Al-H, Si-Al-O, and Si-Al made of Si, AQ, and OlN.
It is composed of a covalent bond of -0-H, Si-0-H, or A-0-H.
光磁気記録層３を形成するＲＥ−Ｔ）１１層は、例えば
膜厚１２０ｎｍのＲＥ−Ｆｅ−Ｃｏ−Ｔｉ系合金で作ら
れティる。ここで、ＲＥは１例えばＴｂの希土類元素で
あり、その量を該ＲＥ−Ｆｅ−Ｃｏ−Ｔｉ系合金におけ
る全体量の１８〜３５原子％とする。 Ｃｏの量は前記
全体量の０〜２０原子％とする。 Ｔｉの量はＦｅ−Ｃ
ｏ−Ｔｉ全体量の２〜１５原子％とする。。The RE-T layer 11 forming the magneto-optical recording layer 3 is made of a RE-Fe-Co-Ti alloy with a thickness of 120 nm, for example. Here, RE is a rare earth element such as Tb, and its amount is 18 to 35 at % of the total amount in the RE-Fe-Co-Ti alloy. The amount of Co is 0 to 20 at% of the total amount. The amount of Ti is Fe-C
The content is 2 to 15 at% of the total amount of o-Ti. .
（１）以上のように構成された光磁気記録用媒体を用い
て光磁気記録ディスクを作り、そのディスクの回転数を
９００ｒＰ■、該ディスク面に照射する半導体レーザ光
を６■Ｗ以下とした場合、１ル濡程度の微小記録を得、
さらに１００万回以上の消去および再書込みの反復に耐
えることが確認できた。(1) A magneto-optical recording disk was made using the magneto-optical recording medium configured as above, the rotation speed of the disk was 900 rP, and the semiconductor laser light irradiated onto the disk surface was 6 W or less. In this case, a microscopic record of about 1 liter of wetness was obtained,
Furthermore, it was confirmed that it could withstand repeated erasing and rewriting more than 1 million times.
（２）また、基板ｌをガラス基板で構成すると共に、保
護層２，４及び光磁気記録層（ＲＥ−７Ｍ層）３をそれ
ぞれ以下の材料で構成して耐食性の比較を行った。(2) In addition, while the substrate 1 was made of a glass substrate, the protective layers 2 and 4 and the magneto-optical recording layer (RE-7M layer) 3 were each made of the following materials, and the corrosion resistance was compared.
ＲＥ−７Ｍ層（Ｃ） ；Ｔｂ３ｏＦｅ７゜Ｎ０９１〜Ｎ
Ｏ，２４；試料番号
その結果１本実施例における光磁気記録用媒体ＮＯ，ｌ
、 ＮＯ，２、Ｎ００４、Ｎ００５、Ｎ０１７、Ｎ００
８、ＮＯ，１Ｏ、ＮＯ，１１、ＮＯ，１３、ＮＯ，１４
は、特に耐食性が著しく優れていることが確認できた。RE-7M layer (C); Tb3oFe7°N091~N
O, 24; Sample number Result 1 Magneto-optical recording medium in this example No. l
, NO, 2, N004, N005, N017, N00
8, NO, 1O, NO, 11, NO, 13, NO, 14
It was confirmed that the corrosion resistance was particularly excellent.
（３）次に、前記（２）の耐食性について第２図（１）
、（２）を参照しつつ説明する。(3) Next, regarding the corrosion resistance in (2) above, see Figure 2 (1).
, (2) will be explained.
第２図（１）、（２）は、試料Ｎ０２１〜Ｎ０．２４を
８５℃、８５％相対湿度雰囲気に保持した後の透過率変
化を示す、該雰囲気に試料を保持すれば、薄膜を貫通す
る孔食が発生するため、その孔食量の増加に伴ない透過
率が増加する。Figures 2 (1) and (2) show the transmittance changes after samples N021 to N0.24 were held in an atmosphere of 85°C and 85% relative humidity. Since pitting corrosion occurs, the transmittance increases as the amount of pitting corrosion increases.
本実施例の光磁気記録用媒体はＲＥ−ＴＭ膜膜体体高耐
食性であり、しかも保護膜２，４を有しているため、耐
食性及び信頼性が非常に高いことがわかる。It can be seen that the magneto-optical recording medium of this example has a RE-TM film body with high corrosion resistance, and has the protective films 2 and 4, so it has very high corrosion resistance and reliability.
（０第３図に本実施例におけるＲＥ−７１４層の各カー
回転角Ｏｋを示す。このＯｋは、光磁気特性で最もｆｆ
ｉ要なものであり、第３図ではＴｂ３ｏＦｅ７υの値と
の比で示されている。(0 Figure 3 shows each Kerr rotation angle Ok of the RE-714 layer in this example. This Ok is the most ff
In FIG. 3, it is shown as a ratio to the value of Tb3oFe7υ.
第３図から明らかなように、Ｔｉ添加量によってカー回
転角Ｏｋの値が変化する。Ｔｉの量をＦｅ＋Ｃａ＋Ｔｉ
の２〜１５％としたのは、耐食性に対するＴｉ添加の効
果が大きく、かつＴｉの過剰添加による磁気争光磁気特
性の劣化のない範囲、あるいはその劣化が問題にならな
い範囲だからである。少丑のＴｉ￥Ａ加はむしろ光磁気
特性を向上させる。As is clear from FIG. 3, the value of the Kerr rotation angle Ok changes depending on the amount of Ti added. The amount of Ti is Fe+Ca+Ti
The reason why Ti is set at 2 to 15% is because the effect of Ti addition on corrosion resistance is large, and it is within a range where the magneto-optical properties do not deteriorate due to excessive addition of Ti, or where the deterioration does not pose a problem. Adding a small amount of Ti\A actually improves the magneto-optical properties.
Ｔｂ量の範囲は、ＲＥ−Ｔに層が垂直磁化膜となる範囲
である。 Ｃｏはカー回転角Ｏｋを増加させるが、その
反面、キュリ一点を急上昇させるため、過度に添加する
と、熱磁気書込みで困難となる。そのため、Ｃｏ添加は
２０％以下としである。The range of the amount of Tb is such that the layer becomes a perpendicular magnetization film in RE-T. Co increases the Kerr rotation angle Ok, but on the other hand, it sharply increases the Curie point, so if it is added excessively, thermomagnetic writing becomes difficult. Therefore, the Co addition is limited to 20% or less.
第４図〜第８図は本発明の他の実施例を示す光磁気記録
用媒体の概略断面図である。4 to 8 are schematic cross-sectional views of magneto-optical recording media showing other embodiments of the present invention.
第４図の光磁気記録用媒体は、基板ｌと光磁気記録層３
との間の保、４１１１２、あるいはカー効果エンハンス
メント層がない構造である。The magneto-optical recording medium shown in FIG. 4 includes a substrate l and a magneto-optical recording layer 3.
41112, or a structure without a Kerr effect enhancement layer.
第５図の光磁気記録用媒体は、光磁気記録層３と保護層
４との間に反射層ｌＯを設けた構造、第６図の光磁気記
録用媒体は、保護層４の上に反射層１０を設けた構造で
ある。The magneto-optical recording medium shown in FIG. 5 has a structure in which a reflective layer 10 is provided between the magneto-optical recording layer 3 and the protective layer 4, and the magneto-optical recording medium shown in FIG. This is a structure in which a layer 10 is provided.
第７図の光磁気記録用媒体は、保護層４上に接着層１１
を介してカバー基板１２を貼着した構造である。The magneto-optical recording medium shown in FIG. 7 has an adhesive layer 11 on a protective layer 4.
It has a structure in which the cover substrate 12 is attached via the .
また、第８図の光磁気記録用媒体は、基板１、保護層２
．光磁気記録層３及保護層４の積層構造上に、さらに接
着層１１、保護層１３、光磁気配Ｒ層１４、保護層１５
及び基板１６を順次ａ層して両面記録型構造になってい
る。Further, the magneto-optical recording medium shown in FIG. 8 includes a substrate 1, a protective layer 2,
．． On the laminated structure of the magneto-optical recording layer 3 and the protective layer 4, an adhesive layer 11, a protective layer 13, a magneto-optical R layer 14, and a protective layer 15 are further formed.
A double-sided recording type structure is obtained by sequentially forming the A layer and the substrate 16.
このように第１図の光磁気記録用媒体を第４図〜第８図
のように変形しても、第１図のものと略同様の効果が得
られる。In this way, even if the magneto-optical recording medium of FIG. 1 is modified as shown in FIGS. 4 to 8, substantially the same effect as that of FIG. 1 can be obtained.
本発明は上記実施例に限定されず、さらに他の変形が可
能である。その変形例として例えば次のようなものがあ
る。The present invention is not limited to the above embodiments, and other modifications are possible. Examples of such modifications include the following.
（ｉ）基板１ 、１２．１８は、ガラス板や樹脂板で構
成する以外に、板状、シート状、テープ状、その他の形
状で、しかも任意所望の材料で構成することができる。(i) The substrates 1, 12, 18 may be made of a plate, sheet, tape, or other shape, in addition to being made of a glass plate or a resin plate, and may be made of any desired material.
（ｉｉ） ＲＥ−Ｆｅ−Ｃｏ−Ｔｉ系合金におけるＲ
Ｅは、希土類として丁すを用いたが、これに限定される
ものではなく、丁す、Ｄｙ、Ｇｄ、Ｎｄ等の１種、また
は２種以上の希土類を用いたものでも、上記の保護層効
果、及びＲＥ−Ｔｌｉ１層でのＴｉ添加の効果は上記実
施例と同様である。そのため、得られる光磁気記録用媒
体も、 Ｔｂの場合と同様に優れた特性を有する。(ii) R in RE-Fe-Co-Ti alloy
E uses carbon as the rare earth, but it is not limited to this, and the above protective layer can also be formed using one or more rare earths such as carbon, Dy, Gd, and Nd. The effect and the effect of adding Ti in the RE-Ti layer are the same as in the above embodiment. Therefore, the resulting magneto-optical recording medium also has excellent properties as in the case of Tb.
（発明の効果）
以上詳細に説明したように、本発明によれば、光磁気記
録層を形成するＲＥ−７Ｍ層として高耐食性、かつ優れ
た磁気・光磁気特性を持つ材料を用い、しかも優れた保
護性能を持った保護層を併用しているため、耐食性及び
記録、再生特性が著しく向上する。(Effects of the Invention) As described above in detail, according to the present invention, a material with high corrosion resistance and excellent magnetic and magneto-optical properties is used as the RE-7M layer forming the magneto-optical recording layer, and Since a protective layer with high protection performance is also used, corrosion resistance and recording and playback characteristics are significantly improved.
第１図は本発明の実施例を示す光磁気記録用媒体の概略
断面図、第２図（１）、（２）は耐食性の実験結果を示
す図、第３図はカー回転角比の実験結果を示す図、第４
図、第５図、第６図、第７図及び第８図は本発明の他の
実施例を示す光磁気記録用媒体の概略断面図である。
１．１８・・・・・・基板、２ 、４ 、１３．１５・
・・・・・保護層、３．１４・・・・・・光磁気記録層
、ｌＯ・・・・・・反射層、１１・・・・・・接着層、
１２・・・・・・カバー基板。
出願人代理人 柿 本 恭 成第１図
イ呆持時間Ｃ時間）
耐変性の実験結果
第２図（１）
４泉持時間（時間）
カー回転角比の実験結果
第３図
第４図 他の記録用媒体第５図
第６図 他の記録用媒体第７図
イ也の記録用媒体、
第８図Figure 1 is a schematic cross-sectional view of a magneto-optical recording medium showing an example of the present invention, Figures 2 (1) and (2) are diagrams showing the results of an experiment on corrosion resistance, and Figure 3 is an experiment on Kerr rotation angle ratio. Figure showing the results, 4th
5, 6, 7, and 8 are schematic sectional views of magneto-optical recording media showing other embodiments of the present invention. 1.18...Substrate, 2, 4, 13.15.
...protective layer, 3.14 ... magneto-optical recording layer, lO ... reflective layer, 11 ... adhesive layer,
12...Cover board. Applicant's agent Yasushi Kakimoto (Figure 1) Resistance time (C hours) Experimental results of deterioration resistance Figure 2 (1) 4 spring retention time (hours) Experimental results of Kerr rotation angle ratio Figure 3 Figure 4, etc. Other recording media Figure 5 Figure 6 Other recording media Figure 7 Recording media of Figure 8
Claims (1)
光磁気記録層を保護する保護層を形成した光磁気記録用
媒体において、 前記光磁気記録層は、ＲＥ−Ｆｅ−Ｃｏ−Ｔｉ系合金で
形成し、さらに前記ＲＥは前記ＲＥ−Ｆｅ−Ｃｏ−Ｔｉ
系合金における全体量の１８〜３５原子％量を持った希
土類元素または２種以上の希土類元素の合金で、前記Ｆ
ｅは鉄で、前記Ｃｏは前記全体量の０〜２０原子％量を
持ったコバルトで、前記Ｔｉは前記Ｆｅ−Ｃｏ−Ｔｉ全
体量における２〜１５原子％量を持ったチタンで、それ
ぞれ構成し、 前記保護層は、ケイ素Ｓｉ、アルミニウムＡｌ、酸素Ｏ
、チッ素ＮからなるＳｉ−Ａｌ−Ｎ、Ｓｉ−Ａｌ−Ｏ、
Ｓｉ−Ａｌ−Ｏ−Ｎ、Ｓｉ−Ｏ−Ｈ、またはＡｌ−Ｏ−
Ｎの共有結合で構成したことを特徴とする光磁気記録用
媒体。[Scope of Claims] A magneto-optical recording medium in which at least a magneto-optical recording layer is formed on a substrate and a protective layer for protecting the magneto-optical recording layer is formed, wherein the magneto-optical recording layer is made of RE-Fe-Co. - Ti-based alloy, and the RE is formed of the RE-Fe-Co-Ti.
A rare earth element or an alloy of two or more rare earth elements having an amount of 18 to 35 atomic % of the total amount in the system alloy, and the F
e is iron, the Co is cobalt having an amount of 0 to 20 atom% of the total amount, and the Ti is titanium having an amount of 2 to 15 atom% of the total amount of Fe-Co-Ti. and the protective layer is made of silicon Si, aluminum Al, oxygen O
, Si-Al-N consisting of nitrogen N, Si-Al-O,
Si-Al-O-N, Si-O-H, or Al-O-
A magneto-optical recording medium characterized by comprising a covalent bond of N.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61038706A JP2504946B2 (en) | 1986-02-24 | 1986-02-24 | Magneto-optical recording medium |
| EP87301018A EP0233062B1 (en) | 1986-02-05 | 1987-02-05 | Magneto-optic memory medium |
| DE8787301018T DE3778389D1 (en) | 1986-02-05 | 1987-02-05 | MAGNETIC-OPTICAL MEMORY MEDIUM. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61038706A JP2504946B2 (en) | 1986-02-24 | 1986-02-24 | Magneto-optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62197939A true JPS62197939A (en) | 1987-09-01 |
| JP2504946B2 JP2504946B2 (en) | 1996-06-05 |
Family
ID=12532759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61038706A Expired - Lifetime JP2504946B2 (en) | 1986-02-05 | 1986-02-24 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2504946B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1989006037A1 (en) * | 1987-12-24 | 1989-06-29 | Matsushita Electric Industrial Co., Ltd. | Data recording medium |
| JPH0224853A (en) * | 1988-07-13 | 1990-01-26 | Matsushita Electric Ind Co Ltd | Magneto-optical recording medium |
| JPH0294146A (en) * | 1988-09-30 | 1990-04-04 | Ricoh Co Ltd | Magneto-optical recording medium |
| WO1990011602A1 (en) * | 1989-03-28 | 1990-10-04 | Seiko Epson Corporation | Magnetooptical medium |
| JPH0388152A (en) * | 1989-08-31 | 1991-04-12 | Kyocera Corp | Magneto-optical recording element |
| JPH03269847A (en) * | 1990-03-12 | 1991-12-02 | Internatl Business Mach Corp <Ibm> | High-anticorrosive optical magnetic recording media |
| US5156909A (en) * | 1989-11-28 | 1992-10-20 | Battelle Memorial Institute | Thick, low-stress films, and coated substrates formed therefrom, and methods for making same |
| US5192626A (en) * | 1988-12-14 | 1993-03-09 | Teijin Limited | Optical recording medium |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984358A (en) * | 1982-11-04 | 1984-05-16 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS6122458A (en) * | 1984-07-09 | 1986-01-31 | Kyocera Corp | Photomagnetic recording element |
-
1986
- 1986-02-24 JP JP61038706A patent/JP2504946B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984358A (en) * | 1982-11-04 | 1984-05-16 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
| JPS6122458A (en) * | 1984-07-09 | 1986-01-31 | Kyocera Corp | Photomagnetic recording element |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1989006037A1 (en) * | 1987-12-24 | 1989-06-29 | Matsushita Electric Industrial Co., Ltd. | Data recording medium |
| JPH0224853A (en) * | 1988-07-13 | 1990-01-26 | Matsushita Electric Ind Co Ltd | Magneto-optical recording medium |
| JPH0294146A (en) * | 1988-09-30 | 1990-04-04 | Ricoh Co Ltd | Magneto-optical recording medium |
| US5192626A (en) * | 1988-12-14 | 1993-03-09 | Teijin Limited | Optical recording medium |
| WO1990011602A1 (en) * | 1989-03-28 | 1990-10-04 | Seiko Epson Corporation | Magnetooptical medium |
| US5667887A (en) * | 1989-03-28 | 1997-09-16 | Seiko Epson Corporation | Magneto-optical media |
| JPH0388152A (en) * | 1989-08-31 | 1991-04-12 | Kyocera Corp | Magneto-optical recording element |
| US5156909A (en) * | 1989-11-28 | 1992-10-20 | Battelle Memorial Institute | Thick, low-stress films, and coated substrates formed therefrom, and methods for making same |
| JPH03269847A (en) * | 1990-03-12 | 1991-12-02 | Internatl Business Mach Corp <Ibm> | High-anticorrosive optical magnetic recording media |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2504946B2 (en) | 1996-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0514407B2 (en) | ||
| JPS62197939A (en) | Photomagnetic recording medium | |
| EP0233062A2 (en) | Magneto-optic memory medium | |
| JPS62275340A (en) | Protective film for magneto-optical recording medium | |
| JPS62200551A (en) | Photomagnetic recording medium | |
| JPS62232736A (en) | Photomagnetic recording medium | |
| JPS62162259A (en) | Photomagnetic recording medium | |
| JPS62239447A (en) | Magneto-optical recording medium | |
| JPS62232738A (en) | Photomagnetic recording medium | |
| JPS62164243A (en) | Photomagnetic recording medium | |
| JPS62246160A (en) | Medium for photomagnetic recording | |
| JP2629062B2 (en) | Medium for magneto-optical memory | |
| JPS62212946A (en) | Medium for photomagnetic recording | |
| JP2620088B2 (en) | Magneto-optical recording element and manufacturing method thereof | |
| JPS62273636A (en) | Magneto-optical recording medium | |
| JPS6252743A (en) | Optical recording medium | |
| JPS6168748A (en) | Photomagnetic recording medium | |
| JP2552345B2 (en) | Method for manufacturing magneto-optical recording medium | |
| JPS62232737A (en) | Photomagnetic recording medium | |
| JP2654676B2 (en) | Magneto-optical recording element | |
| JPS62241153A (en) | Magneto-optical recording medium | |
| JPS6353735A (en) | Magneto-optical recording medium | |
| JPS62200550A (en) | Photomagnetic recording medium | |
| JPS62212945A (en) | Medium for photomagnetic recording | |
| JPS61243976A (en) | Photomagnetic recording medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |