JPS62197900U - - Google Patents

Info

Publication number
JPS62197900U
JPS62197900U JP8736386U JP8736386U JPS62197900U JP S62197900 U JPS62197900 U JP S62197900U JP 8736386 U JP8736386 U JP 8736386U JP 8736386 U JP8736386 U JP 8736386U JP S62197900 U JPS62197900 U JP S62197900U
Authority
JP
Japan
Prior art keywords
pusher
pushes
rail
actuator
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8736386U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8736386U priority Critical patent/JPS62197900U/ja
Publication of JPS62197900U publication Critical patent/JPS62197900U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第６図は本考案の一実施例を示し
、第１図から第４図までは異なる動作状態をあら
わす部分正面図、第５図は部分上面図、第６図は
部分断面図である。第７図ないし第１０図は基板
押し込み動作の説明図である。 １……Ｘ―Ｙテーブル、３……ローダ、４……
アンローダ、７ａ，７ｂ，７ｃ，７ｄ……基板、
２４……レール、２６……前部プツシヤ、２７…
…後部プツシヤ、５０……相互間隔変更用アクチ
ユエータ、５１……移動用アクチユエータ。 Figures 1 to 6 show an embodiment of the present invention, with Figures 1 to 4 being partial front views showing different operating states, Figure 5 being a partial top view, and Figure 6 being a partial sectional view. It is. 7 to 10 are explanatory diagrams of the substrate pushing operation. 1...X-Y table, 3...Loader, 4...
Unloader, 7a, 7b, 7c, 7d...board,
24...Rail, 26...Front pusher, 27...
...Rear pusher, 50... Actuator for changing mutual spacing, 51... Actuator for movement.

Claims (1)

【実用新案登録請求の範囲】 ローダに並んだ前後２枚の基板を同時にＸ―Ｙ
テーブルに押し込んで行くものにおいて、 前方の基板を押す前部プツシヤと、後方の基板
を押す後部プツシヤとを共通のレールに支持し、
これら両プツシヤを、相互間隔変更用アクチユエ
ータで互に連結すると共に、かかるプツシヤ連結
体を移動用アクチユエータでレールに沿い移動さ
せてなる基板搬送装置。[Scope of claim for utility model registration] Simultaneously X-Y two boards lined up on the loader
In a device that is pushed onto a table, the front pusher that pushes the front board and the rear pusher that pushes the back board are supported on a common rail.
A substrate transfer device in which both of these pushers are connected to each other by a mutual distance changing actuator, and the pusher connection body is moved along a rail by a moving actuator.
JP8736386U 1986-06-09 1986-06-09 Pending JPS62197900U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8736386U JPS62197900U (en) 1986-06-09 1986-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8736386U JPS62197900U (en) 1986-06-09 1986-06-09

Publications (1)

Publication Number Publication Date
JPS62197900U true JPS62197900U (en) 1987-12-16

Family

ID=30944500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8736386U Pending JPS62197900U (en) 1986-06-09 1986-06-09

Country Status (1)

Country Link
JP (1) JPS62197900U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207999A (en) * 1988-02-16 1989-08-21 Sanyo Electric Co Ltd Base plate positioning apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163088A (en) * 1983-03-08 1984-09-14 Sumitomo Metal Ind Ltd Production of seamless clad pipe
JPS6113997B2 (en) * 1978-02-28 1986-04-16 Dainippon Insatsu Kk

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113997B2 (en) * 1978-02-28 1986-04-16 Dainippon Insatsu Kk
JPS59163088A (en) * 1983-03-08 1984-09-14 Sumitomo Metal Ind Ltd Production of seamless clad pipe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207999A (en) * 1988-02-16 1989-08-21 Sanyo Electric Co Ltd Base plate positioning apparatus

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