JPS62197855U - - Google Patents
Info
- Publication number
- JPS62197855U JPS62197855U JP7442587U JP7442587U JPS62197855U JP S62197855 U JPS62197855 U JP S62197855U JP 7442587 U JP7442587 U JP 7442587U JP 7442587 U JP7442587 U JP 7442587U JP S62197855 U JPS62197855 U JP S62197855U
- Authority
- JP
- Japan
- Prior art keywords
- side wall
- wafer
- side walls
- width
- wrap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案によるウエハ用治具の一実施例
を示す斜視図、第２図は第１図の―線断面図
である。
１０，１２……側壁、１０ａ，１２ａ……側壁
、１４，１６……端板、１８……ウエハ、２０，
２２……ウエハ収容溝。
FIG. 1 is a perspective view showing an embodiment of a wafer jig according to the present invention, and FIG. 2 is a sectional view taken along the line -- in FIG. 10, 12... side wall, 10a, 12a... side wall, 14, 16... end plate, 18... wafer, 20,
22...Wafer accommodation groove.
Claims (1)
のウエハ用治具であつて、両側壁の内側対向面に
、前記側壁の外側面に開口しないように形成され
たウエハ収容溝を有し、対向する前記溝間の幅は
、前記側壁の下方側に向つて徐々に狹くなり、さ
らに前記側壁の下方部において収容すべきウエハ
の下方部に回り込むように前記側壁の上方部の幅
に比較して著しく狹くなるように形成され、前記
側壁の外側面はその下方部において前記溝にほぼ
沿つて回り込むように形成される回り込み部を有
することを特徴とするウエハ用治具。 The wafer jig is for carrying the wafer by holding the outer surfaces of the side walls by hand, and has a wafer storage groove formed on the inner facing surface of the both side walls so as not to open on the outer surface of the side walls. , the width between the opposing grooves gradually becomes narrower toward the lower side of the side wall, and further increases to the width of the upper part of the side wall so as to wrap around the lower part of the wafer to be accommodated in the lower part of the side wall. A wafer jig characterized in that the side wall is formed to be extremely narrow in comparison, and the outer surface of the side wall has a wrap-around portion formed to wrap around the groove substantially at a lower portion thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7442587U JPS62197855U (en) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7442587U JPS62197855U (en) | 1987-05-20 | 1987-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197855U true JPS62197855U (en) | 1987-12-16 |
Family
ID=30919630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7442587U Pending JPS62197855U (en) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197855U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110062A (en) * | 1974-07-10 | 1976-01-27 | Mitsui Toatsu Chemicals | Kinokoruino jinkosaibaisochi |
| JPS5598822A (en) * | 1979-01-24 | 1980-07-28 | Hitachi Ltd | Wafer holding jig |
-
1987
- 1987-05-20 JP JP7442587U patent/JPS62197855U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110062A (en) * | 1974-07-10 | 1976-01-27 | Mitsui Toatsu Chemicals | Kinokoruino jinkosaibaisochi |
| JPS5598822A (en) * | 1979-01-24 | 1980-07-28 | Hitachi Ltd | Wafer holding jig |