JPS62197628U - - Google Patents
Info
- Publication number
- JPS62197628U JPS62197628U JP8617086U JP8617086U JPS62197628U JP S62197628 U JPS62197628 U JP S62197628U JP 8617086 U JP8617086 U JP 8617086U JP 8617086 U JP8617086 U JP 8617086U JP S62197628 U JPS62197628 U JP S62197628U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- holding
- pair
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 10
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617086U JPS62197628U (ro) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617086U JPS62197628U (ro) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197628U true JPS62197628U (ro) | 1987-12-16 |
Family
ID=30942234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8617086U Pending JPS62197628U (ro) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197628U (ro) |
-
1986
- 1986-06-06 JP JP8617086U patent/JPS62197628U/ja active Pending