JPS62196345U - - Google Patents
Info
- Publication number
- JPS62196345U JPS62196345U JP8521686U JP8521686U JPS62196345U JP S62196345 U JPS62196345 U JP S62196345U JP 8521686 U JP8521686 U JP 8521686U JP 8521686 U JP8521686 U JP 8521686U JP S62196345 U JPS62196345 U JP S62196345U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing table
- semiconductor wafer
- wafer fixing
- inclined surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8521686U JPS62196345U (he) | 1986-06-04 | 1986-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8521686U JPS62196345U (he) | 1986-06-04 | 1986-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62196345U true JPS62196345U (he) | 1987-12-14 |
Family
ID=30940419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8521686U Pending JPS62196345U (he) | 1986-06-04 | 1986-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62196345U (he) |
-
1986
- 1986-06-04 JP JP8521686U patent/JPS62196345U/ja active Pending