JPS62196343U - - Google Patents
Info
- Publication number
- JPS62196343U JPS62196343U JP8489586U JP8489586U JPS62196343U JP S62196343 U JPS62196343 U JP S62196343U JP 8489586 U JP8489586 U JP 8489586U JP 8489586 U JP8489586 U JP 8489586U JP S62196343 U JPS62196343 U JP S62196343U
- Authority
- JP
- Japan
- Prior art keywords
- load lock
- gate valve
- transferred
- chamber
- lock chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8489586U JPS62196343U (enExample) | 1986-06-04 | 1986-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8489586U JPS62196343U (enExample) | 1986-06-04 | 1986-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62196343U true JPS62196343U (enExample) | 1987-12-14 |
Family
ID=30939803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8489586U Pending JPS62196343U (enExample) | 1986-06-04 | 1986-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62196343U (enExample) |
-
1986
- 1986-06-04 JP JP8489586U patent/JPS62196343U/ja active Pending