JPS62196343U - - Google Patents

Info

Publication number
JPS62196343U
JPS62196343U JP8489586U JP8489586U JPS62196343U JP S62196343 U JPS62196343 U JP S62196343U JP 8489586 U JP8489586 U JP 8489586U JP 8489586 U JP8489586 U JP 8489586U JP S62196343 U JPS62196343 U JP S62196343U
Authority
JP
Japan
Prior art keywords
load lock
gate valve
transferred
chamber
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8489586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8489586U priority Critical patent/JPS62196343U/ja
Publication of JPS62196343U publication Critical patent/JPS62196343U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8489586U 1986-06-04 1986-06-04 Pending JPS62196343U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8489586U JPS62196343U (enrdf_load_stackoverflow) 1986-06-04 1986-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8489586U JPS62196343U (enrdf_load_stackoverflow) 1986-06-04 1986-06-04

Publications (1)

Publication Number Publication Date
JPS62196343U true JPS62196343U (enrdf_load_stackoverflow) 1987-12-14

Family

ID=30939803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8489586U Pending JPS62196343U (enrdf_load_stackoverflow) 1986-06-04 1986-06-04

Country Status (1)

Country Link
JP (1) JPS62196343U (enrdf_load_stackoverflow)

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