JPS62196342U - - Google Patents

Info

Publication number
JPS62196342U
JPS62196342U JP8425786U JP8425786U JPS62196342U JP S62196342 U JPS62196342 U JP S62196342U JP 8425786 U JP8425786 U JP 8425786U JP 8425786 U JP8425786 U JP 8425786U JP S62196342 U JPS62196342 U JP S62196342U
Authority
JP
Japan
Prior art keywords
nozzle
guide ring
semiconductor wafer
wafer chuck
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8425786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8425786U priority Critical patent/JPS62196342U/ja
Publication of JPS62196342U publication Critical patent/JPS62196342U/ja
Pending legal-status Critical Current

Links

JP8425786U 1986-06-03 1986-06-03 Pending JPS62196342U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8425786U JPS62196342U (US20030204162A1-20031030-M00001.png) 1986-06-03 1986-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8425786U JPS62196342U (US20030204162A1-20031030-M00001.png) 1986-06-03 1986-06-03

Publications (1)

Publication Number Publication Date
JPS62196342U true JPS62196342U (US20030204162A1-20031030-M00001.png) 1987-12-14

Family

ID=30938591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8425786U Pending JPS62196342U (US20030204162A1-20031030-M00001.png) 1986-06-03 1986-06-03

Country Status (1)

Country Link
JP (1) JPS62196342U (US20030204162A1-20031030-M00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011060849A (ja) * 2009-09-07 2011-03-24 Murata Machinery Ltd 基板移載装置
JP2022161793A (ja) * 2021-04-09 2022-10-21 浙江大学 拡張放射流動機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011060849A (ja) * 2009-09-07 2011-03-24 Murata Machinery Ltd 基板移載装置
JP2022161793A (ja) * 2021-04-09 2022-10-21 浙江大学 拡張放射流動機構

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