JPS62196339U - - Google Patents

Info

Publication number
JPS62196339U
JPS62196339U JP8401686U JP8401686U JPS62196339U JP S62196339 U JPS62196339 U JP S62196339U JP 8401686 U JP8401686 U JP 8401686U JP 8401686 U JP8401686 U JP 8401686U JP S62196339 U JPS62196339 U JP S62196339U
Authority
JP
Japan
Prior art keywords
stage
semiconductor wafer
autoprober
recess
measures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8401686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8401686U priority Critical patent/JPS62196339U/ja
Publication of JPS62196339U publication Critical patent/JPS62196339U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP8401686U 1986-06-04 1986-06-04 Pending JPS62196339U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8401686U JPS62196339U (US20080293856A1-20081127-C00150.png) 1986-06-04 1986-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8401686U JPS62196339U (US20080293856A1-20081127-C00150.png) 1986-06-04 1986-06-04

Publications (1)

Publication Number Publication Date
JPS62196339U true JPS62196339U (US20080293856A1-20081127-C00150.png) 1987-12-14

Family

ID=30938132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8401686U Pending JPS62196339U (US20080293856A1-20081127-C00150.png) 1986-06-04 1986-06-04

Country Status (1)

Country Link
JP (1) JPS62196339U (US20080293856A1-20081127-C00150.png)

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