JPS62195289U - - Google Patents

Info

Publication number

JPS62195289U

JPS62195289U JP8042786U JP8042786U JPS62195289U JP S62195289 U JPS62195289 U JP S62195289U JP 8042786 U JP8042786 U JP 8042786U JP 8042786 U JP8042786 U JP 8042786U JP S62195289 U JPS62195289 U JP S62195289U

Authority

JP

Japan

Prior art keywords

entry field

utility

model registration

layer

optical information

Prior art date

1986-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• 230000003287 optical effect Effects 0.000 claims description 14
• 239000000463 material Substances 0.000 claims description 2
• 230000001235 sensitizing effect Effects 0.000 claims 4
• UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 2
• 150000004767 nitrides Chemical class 0.000 claims 2
• 230000001681 protective effect Effects 0.000 claims 2
• ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
• HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
• QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• 229910052796 boron Inorganic materials 0.000 claims 1
• 229910052749 magnesium Inorganic materials 0.000 claims 1
• 239000011777 magnesium Substances 0.000 claims 1
• 238000001259 photo etching Methods 0.000 claims 1
• 239000011347 resin Substances 0.000 claims 1
• 229920005989 resin Polymers 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 229910052715 tantalum Inorganic materials 0.000 claims 1
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
• 229910052714 tellurium Inorganic materials 0.000 claims 1
• PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims 1
• 239000011701 zinc Substances 0.000 claims 1
• 229910052725 zinc Inorganic materials 0.000 claims 1
• 229910052726 zirconium Inorganic materials 0.000 claims 1