JPS62193754U - - Google Patents
Info
- Publication number
- JPS62193754U JPS62193754U JP8208486U JP8208486U JPS62193754U JP S62193754 U JPS62193754 U JP S62193754U JP 8208486 U JP8208486 U JP 8208486U JP 8208486 U JP8208486 U JP 8208486U JP S62193754 U JPS62193754 U JP S62193754U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- capacitor
- flow
- discharge space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 8
- 150000004820 halides Chemical class 0.000 claims description 5
- 239000000615 nonconductor Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案の一実施例のコンデンサ内蔵形
希ガスハライドエキシマレーザを示す横断面図、
第２図は第１図実施例においてピーキングコンデ
ンサを覆つた耐ハロゲン性の高い電気的絶縁体を
示す斜視図、第３図は従来のコンデンサ内蔵形希
ガスハライドエキシマレーザの斜視図、第４図は
第３図のコンデンサ内蔵形希ガスハライドエキシ
マレーザを示す横断面図である。
１……電気的絶縁体、２，７……ピーキングコ
ンデンサ、３，８……主放電電極、４，９……主
放電空間、５，１０……フアン、６，１１……レ
ーザガスの流れ。
FIG. 1 is a cross-sectional view showing a rare gas halide excimer laser with a built-in capacitor according to an embodiment of the present invention;
Figure 2 is a perspective view showing a highly halogen-resistant electrical insulator covering the peaking capacitor in the embodiment shown in Figure 1, Figure 3 is a perspective view of a conventional rare gas halide excimer laser with a built-in capacitor, and Figure 4. 4 is a cross-sectional view showing the rare gas halide excimer laser with a built-in capacitor shown in FIG. 3. FIG. 1... Electric insulator, 2, 7... Peaking capacitor, 3, 8... Main discharge electrode, 4, 9... Main discharge space, 5, 10... Fan, 6, 11... Laser gas flow.
Claims (1)
励起のための主放電空間の光軸方向に沿つて複数
個設置し、レーザ媒質であるレーザガスを前記主
放電空間に流すための循環器を備えたコンデンサ
内蔵形希ガスハライドエキシマレーザにおいて、
前記ピーキングコンデンサが耐ハロゲン性の高い
電気的絶縁体で覆つてあり、前記電気的絶縁体の
前記レーザガスの流れに接する主要な面が曲面で
あり、この曲面は少ない流線の乱れで前記レーザ
ガスを前記主放電空間に導くことを特徴とするコ
ンデンサ内蔵形希ガスハライドエキシマレーザ。 A rare type with built-in capacitor is installed in the laser container along the optical axis direction of the main discharge space for laser excitation, and is equipped with a circulator to flow the laser gas, which is the laser medium, into the main discharge space. In gas halide excimer laser,
The peaking capacitor is covered with an electrical insulator having high halogen resistance, and the main surface of the electrical insulator that is in contact with the flow of the laser gas is a curved surface, and this curved surface allows the laser gas to flow with less disturbance of the streamlines. A rare gas halide excimer laser with a built-in capacitor, which is led to the main discharge space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8208486U JPS62193754U (en) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8208486U JPS62193754U (en) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193754U true JPS62193754U (en) | 1987-12-09 |
Family
ID=30934417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8208486U Pending JPS62193754U (en) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193754U (en) |
-
1986
- 1986-05-30 JP JP8208486U patent/JPS62193754U/ja active Pending
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