JPS62193743U - - Google Patents
Info
- Publication number
- JPS62193743U JPS62193743U JP8338586U JP8338586U JPS62193743U JP S62193743 U JPS62193743 U JP S62193743U JP 8338586 U JP8338586 U JP 8338586U JP 8338586 U JP8338586 U JP 8338586U JP S62193743 U JPS62193743 U JP S62193743U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion layer
- hole
- insulating film
- semiconductor substrate
- phosphorus concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 239000013067 intermediate product Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8338586U JPS62193743U (fi) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8338586U JPS62193743U (fi) | 1986-05-30 | 1986-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62193743U true JPS62193743U (fi) | 1987-12-09 |
Family
ID=30936922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8338586U Pending JPS62193743U (fi) | 1986-05-30 | 1986-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62193743U (fi) |
-
1986
- 1986-05-30 JP JP8338586U patent/JPS62193743U/ja active Pending