JPS62193731U - - Google Patents
Info
- Publication number
- JPS62193731U JPS62193731U JP1986082625U JP8262586U JPS62193731U JP S62193731 U JPS62193731 U JP S62193731U JP 1986082625 U JP1986082625 U JP 1986082625U JP 8262586 U JP8262586 U JP 8262586U JP S62193731 U JPS62193731 U JP S62193731U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- film deposition
- groove
- support boat
- wafer support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986082625U JPS62193731U (enExample) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986082625U JPS62193731U (enExample) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193731U true JPS62193731U (enExample) | 1987-12-09 |
Family
ID=30935443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986082625U Pending JPS62193731U (enExample) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193731U (enExample) |
-
1986
- 1986-05-30 JP JP1986082625U patent/JPS62193731U/ja active Pending