JPS62192869U - - Google Patents
Info
- Publication number
- JPS62192869U JPS62192869U JP7969686U JP7969686U JPS62192869U JP S62192869 U JPS62192869 U JP S62192869U JP 7969686 U JP7969686 U JP 7969686U JP 7969686 U JP7969686 U JP 7969686U JP S62192869 U JPS62192869 U JP S62192869U
- Authority
- JP
- Japan
- Prior art keywords
- grip portion
- carrier
- parallel
- semiconductor wafer
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 3
- 210000005069 ears Anatomy 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7969686U JPS62192869U (enExample) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7969686U JPS62192869U (enExample) | 1986-05-27 | 1986-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192869U true JPS62192869U (enExample) | 1987-12-08 |
Family
ID=30929804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7969686U Pending JPS62192869U (enExample) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192869U (enExample) |
-
1986
- 1986-05-27 JP JP7969686U patent/JPS62192869U/ja active Pending