JPS62192652U - - Google Patents

Info

Publication number

JPS62192652U

JPS62192652U JP8147786U JP8147786U JPS62192652U JP S62192652 U JPS62192652 U JP S62192652U JP 8147786 U JP8147786 U JP 8147786U JP 8147786 U JP8147786 U JP 8147786U JP S62192652 U JPS62192652 U JP S62192652U

Authority

JP

Japan

Prior art keywords

thick film

layer

film conductor

insulator layer

substrate

Prior art date

1986-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims description 6
• 239000004020 conductor Substances 0.000 claims description 5
• 239000012212 insulator Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 230000001012 protector Effects 0.000 description 1