JPS62192298U - - Google Patents
Info
- Publication number
- JPS62192298U JPS62192298U JP7881786U JP7881786U JPS62192298U JP S62192298 U JPS62192298 U JP S62192298U JP 7881786 U JP7881786 U JP 7881786U JP 7881786 U JP7881786 U JP 7881786U JP S62192298 U JPS62192298 U JP S62192298U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- static pressure
- working fluid
- fine movement
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 8
- 230000003068 static effect Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 3
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7881786U JPS62192298U (enExample) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7881786U JPS62192298U (enExample) | 1986-05-27 | 1986-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192298U true JPS62192298U (enExample) | 1987-12-07 |
Family
ID=30928107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7881786U Pending JPS62192298U (enExample) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192298U (enExample) |
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1986
- 1986-05-27 JP JP7881786U patent/JPS62192298U/ja active Pending