JPS62192237U - - Google Patents

Info

Publication number
JPS62192237U
JPS62192237U JP7888786U JP7888786U JPS62192237U JP S62192237 U JPS62192237 U JP S62192237U JP 7888786 U JP7888786 U JP 7888786U JP 7888786 U JP7888786 U JP 7888786U JP S62192237 U JPS62192237 U JP S62192237U
Authority
JP
Japan
Prior art keywords
light source
mask film
exposure light
parallelism
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7888786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7888786U priority Critical patent/JPS62192237U/ja
Publication of JPS62192237U publication Critical patent/JPS62192237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP7888786U 1986-05-27 1986-05-27 Pending JPS62192237U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7888786U JPS62192237U (US20110009641A1-20110113-C00185.png) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7888786U JPS62192237U (US20110009641A1-20110113-C00185.png) 1986-05-27 1986-05-27

Publications (1)

Publication Number Publication Date
JPS62192237U true JPS62192237U (US20110009641A1-20110113-C00185.png) 1987-12-07

Family

ID=30928246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7888786U Pending JPS62192237U (US20110009641A1-20110113-C00185.png) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPS62192237U (US20110009641A1-20110113-C00185.png)

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