JPS62191868U - - Google Patents
Info
- Publication number
- JPS62191868U JPS62191868U JP8066286U JP8066286U JPS62191868U JP S62191868 U JPS62191868 U JP S62191868U JP 8066286 U JP8066286 U JP 8066286U JP 8066286 U JP8066286 U JP 8066286U JP S62191868 U JPS62191868 U JP S62191868U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- chamber
- quartz glass
- plasma chamber
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8066286U JPS62191868U (sk) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8066286U JPS62191868U (sk) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62191868U true JPS62191868U (sk) | 1987-12-05 |
Family
ID=30931672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8066286U Pending JPS62191868U (sk) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62191868U (sk) |
-
1986
- 1986-05-28 JP JP8066286U patent/JPS62191868U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| IL109588A (en) | Electrode for use in a plasma assisted chemical etching process | |
| JPS62191868U (sk) | ||
| JPH022829U (sk) | ||
| JPH0460556U (sk) | ||
| JPS62184733U (sk) | ||
| JPH01145124U (sk) | ||
| JPH0415832U (sk) | ||
| JPH0171439U (sk) | ||
| JPS622245U (sk) | ||
| JPS6245830U (sk) | ||
| JPS6324826U (sk) | ||
| JPS637160U (sk) | ||
| JPH01165627U (sk) | ||
| JPH03101848U (sk) | ||
| JPS63170938U (sk) | ||
| JPH0231126U (sk) | ||
| JPS6224940U (sk) | ||
| JPS62107439U (sk) | ||
| JPH0256432U (sk) | ||
| JPH01100432U (sk) | ||
| JPS62170762U (sk) | ||
| JPS6169282U (sk) | ||
| JPS61168630U (sk) | ||
| JPH0183067U (sk) | ||
| JPS6359319U (sk) |