JPS62191865U - - Google Patents
Info
- Publication number
- JPS62191865U JPS62191865U JP7883986U JP7883986U JPS62191865U JP S62191865 U JPS62191865 U JP S62191865U JP 7883986 U JP7883986 U JP 7883986U JP 7883986 U JP7883986 U JP 7883986U JP S62191865 U JPS62191865 U JP S62191865U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum deposition
- deposition tank
- viewing window
- shielding plate
- window glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7883986U JPS62191865U (OSRAM) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7883986U JPS62191865U (OSRAM) | 1986-05-27 | 1986-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62191865U true JPS62191865U (OSRAM) | 1987-12-05 |
Family
ID=30928151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7883986U Pending JPS62191865U (OSRAM) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62191865U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018148410A (ja) * | 2017-03-06 | 2018-09-20 | 株式会社ムサシノエンジニアリング | 真空容器用の撮像装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4850619A (OSRAM) * | 1971-10-25 | 1973-07-17 |
-
1986
- 1986-05-27 JP JP7883986U patent/JPS62191865U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4850619A (OSRAM) * | 1971-10-25 | 1973-07-17 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018148410A (ja) * | 2017-03-06 | 2018-09-20 | 株式会社ムサシノエンジニアリング | 真空容器用の撮像装置 |