JPS62190687U - - Google Patents

Info

Publication number
JPS62190687U
JPS62190687U JP7883386U JP7883386U JPS62190687U JP S62190687 U JPS62190687 U JP S62190687U JP 7883386 U JP7883386 U JP 7883386U JP 7883386 U JP7883386 U JP 7883386U JP S62190687 U JPS62190687 U JP S62190687U
Authority
JP
Japan
Prior art keywords
chamber
exhaust duct
indicator
box
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7883386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044868Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7883386U priority Critical patent/JPH044868Y2/ja
Publication of JPS62190687U publication Critical patent/JPS62190687U/ja
Application granted granted Critical
Publication of JPH044868Y2 publication Critical patent/JPH044868Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Ventilation (AREA)
JP7883386U 1986-05-27 1986-05-27 Expired JPH044868Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7883386U JPH044868Y2 (enExample) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7883386U JPH044868Y2 (enExample) 1986-05-27 1986-05-27

Publications (2)

Publication Number Publication Date
JPS62190687U true JPS62190687U (enExample) 1987-12-04
JPH044868Y2 JPH044868Y2 (enExample) 1992-02-12

Family

ID=30928139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7883386U Expired JPH044868Y2 (enExample) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPH044868Y2 (enExample)

Also Published As

Publication number Publication date
JPH044868Y2 (enExample) 1992-02-12

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