JPS62190251U - - Google Patents
Info
- Publication number
- JPS62190251U JPS62190251U JP1986080005U JP8000586U JPS62190251U JP S62190251 U JPS62190251 U JP S62190251U JP 1986080005 U JP1986080005 U JP 1986080005U JP 8000586 U JP8000586 U JP 8000586U JP S62190251 U JPS62190251 U JP S62190251U
- Authority
- JP
- Japan
- Prior art keywords
- case
- photomask
- photomask substrate
- lower case
- upper case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986080005U JPS62190251U (OSRAM) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986080005U JPS62190251U (OSRAM) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190251U true JPS62190251U (OSRAM) | 1987-12-03 |
Family
ID=30930412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986080005U Pending JPS62190251U (OSRAM) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190251U (OSRAM) |
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1986
- 1986-05-26 JP JP1986080005U patent/JPS62190251U/ja active Pending