JPS62189732U - - Google Patents

Info

Publication number
JPS62189732U
JPS62189732U JP7775486U JP7775486U JPS62189732U JP S62189732 U JPS62189732 U JP S62189732U JP 7775486 U JP7775486 U JP 7775486U JP 7775486 U JP7775486 U JP 7775486U JP S62189732 U JPS62189732 U JP S62189732U
Authority
JP
Grant status
Application
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7775486U
Other versions
JPH0411707Y2 (en )
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

JP7775486U 1986-05-22 1986-05-22 Granted JPH0411707Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7775486U JPH0411707Y2 (en) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7775486U JPH0411707Y2 (en) 1986-05-22 1986-05-22

Publications (2)

Publication Number Publication Date
JPS62189732U true true JPS62189732U (en) 1987-12-02
JPH0411707Y2 JPH0411707Y2 (en) 1992-03-24

Family

ID=30926057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7775486U Granted JPH0411707Y2 (en) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPH0411707Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame
US9293356B2 (en) 2011-06-03 2016-03-22 Tel Nexx, Inc. Parallel single substrate processing system
US9449862B2 (en) 2011-06-03 2016-09-20 Tel Nexx, Inc. Parallel single substrate processing system
US9508582B2 (en) 2011-06-03 2016-11-29 Tel Nexx, Inc. Parallel single substrate marangoni module

Also Published As

Publication number Publication date Type
JPH0411707Y2 (en) 1992-03-24 grant

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