JPS62188771U - - Google Patents

Info

Publication number

JPS62188771U

JPS62188771U JP1986077401U JP7740186U JPS62188771U JP S62188771 U JPS62188771 U JP S62188771U JP 1986077401 U JP1986077401 U JP 1986077401U JP 7740186 U JP7740186 U JP 7740186U JP S62188771 U JPS62188771 U JP S62188771U

Authority

JP

Japan

Prior art keywords

substrate

light

shielding film

photomask blank

exposed

Prior art date

1986-05-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 8
• 239000000463 material Substances 0.000 claims 1
• VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
• 239000005361 soda-lime glass Substances 0.000 description 2
• 229910052804 chromium Inorganic materials 0.000 description 1
• 239000011651 chromium Substances 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1