JPS62188567U - - Google Patents
Info
- Publication number
- JPS62188567U JPS62188567U JP7614786U JP7614786U JPS62188567U JP S62188567 U JPS62188567 U JP S62188567U JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP S62188567 U JPS62188567 U JP S62188567U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage side
- exhaust port
- passageway
- suction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7614786U JPH0229259Y2 (pl) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7614786U JPH0229259Y2 (pl) | 1986-05-20 | 1986-05-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62188567U true JPS62188567U (pl) | 1987-12-01 |
JPH0229259Y2 JPH0229259Y2 (pl) | 1990-08-06 |
Family
ID=30922954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7614786U Expired JPH0229259Y2 (pl) | 1986-05-20 | 1986-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0229259Y2 (pl) |
-
1986
- 1986-05-20 JP JP7614786U patent/JPH0229259Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0229259Y2 (pl) | 1990-08-06 |