JPS62188567U - - Google Patents

Info

Publication number
JPS62188567U
JPS62188567U JP7614786U JP7614786U JPS62188567U JP S62188567 U JPS62188567 U JP S62188567U JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP S62188567 U JPS62188567 U JP S62188567U
Authority
JP
Japan
Prior art keywords
vacuum pump
stage side
exhaust port
passageway
suction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7614786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229259Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7614786U priority Critical patent/JPH0229259Y2/ja
Publication of JPS62188567U publication Critical patent/JPS62188567U/ja
Application granted granted Critical
Publication of JPH0229259Y2 publication Critical patent/JPH0229259Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP7614786U 1986-05-20 1986-05-20 Expired JPH0229259Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7614786U JPH0229259Y2 (enrdf_load_stackoverflow) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7614786U JPH0229259Y2 (enrdf_load_stackoverflow) 1986-05-20 1986-05-20

Publications (2)

Publication Number Publication Date
JPS62188567U true JPS62188567U (enrdf_load_stackoverflow) 1987-12-01
JPH0229259Y2 JPH0229259Y2 (enrdf_load_stackoverflow) 1990-08-06

Family

ID=30922954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7614786U Expired JPH0229259Y2 (enrdf_load_stackoverflow) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPH0229259Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0229259Y2 (enrdf_load_stackoverflow) 1990-08-06

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