JPS62188346U - - Google Patents

Info

Publication number
JPS62188346U
JPS62188346U JP7719886U JP7719886U JPS62188346U JP S62188346 U JPS62188346 U JP S62188346U JP 7719886 U JP7719886 U JP 7719886U JP 7719886 U JP7719886 U JP 7719886U JP S62188346 U JPS62188346 U JP S62188346U
Authority
JP
Japan
Prior art keywords
slide table
workpiece
optical scale
detection optical
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7719886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7719886U priority Critical patent/JPS62188346U/ja
Publication of JPS62188346U publication Critical patent/JPS62188346U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Control Of Machine Tools (AREA)
JP7719886U 1986-05-22 1986-05-22 Pending JPS62188346U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7719886U JPS62188346U (US20090163788A1-20090625-C00002.png) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7719886U JPS62188346U (US20090163788A1-20090625-C00002.png) 1986-05-22 1986-05-22

Publications (1)

Publication Number Publication Date
JPS62188346U true JPS62188346U (US20090163788A1-20090625-C00002.png) 1987-11-30

Family

ID=30924982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7719886U Pending JPS62188346U (US20090163788A1-20090625-C00002.png) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPS62188346U (US20090163788A1-20090625-C00002.png)

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