JPS62188138U - - Google Patents

Info

Publication number

JPS62188138U

JPS62188138U JP7528286U JP7528286U JPS62188138U JP S62188138 U JPS62188138 U JP S62188138U JP 7528286 U JP7528286 U JP 7528286U JP 7528286 U JP7528286 U JP 7528286U JP S62188138 U JPS62188138 U JP S62188138U

Authority

JP

Japan

Prior art keywords

ion

vacuum vessel

ion source

supplied

utility

Prior art date

1986-05-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 2
• 238000005530 etching Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1