JPS62188137U - - Google Patents
Info
- Publication number
- JPS62188137U JPS62188137U JP7526486U JP7526486U JPS62188137U JP S62188137 U JPS62188137 U JP S62188137U JP 7526486 U JP7526486 U JP 7526486U JP 7526486 U JP7526486 U JP 7526486U JP S62188137 U JPS62188137 U JP S62188137U
- Authority
- JP
- Japan
- Prior art keywords
- detection sensor
- exhaust system
- dry etching
- processing chamber
- cassette chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 3
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526486U JPS62188137U (enExample) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526486U JPS62188137U (enExample) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188137U true JPS62188137U (enExample) | 1987-11-30 |
Family
ID=30921240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7526486U Pending JPS62188137U (enExample) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188137U (enExample) |
-
1986
- 1986-05-21 JP JP7526486U patent/JPS62188137U/ja active Pending