JPS62188137U - - Google Patents

Info

Publication number
JPS62188137U
JPS62188137U JP7526486U JP7526486U JPS62188137U JP S62188137 U JPS62188137 U JP S62188137U JP 7526486 U JP7526486 U JP 7526486U JP 7526486 U JP7526486 U JP 7526486U JP S62188137 U JPS62188137 U JP S62188137U
Authority
JP
Japan
Prior art keywords
detection sensor
exhaust system
dry etching
processing chamber
cassette chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7526486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7526486U priority Critical patent/JPS62188137U/ja
Publication of JPS62188137U publication Critical patent/JPS62188137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP7526486U 1986-05-21 1986-05-21 Pending JPS62188137U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7526486U JPS62188137U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7526486U JPS62188137U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Publications (1)

Publication Number Publication Date
JPS62188137U true JPS62188137U (enrdf_load_stackoverflow) 1987-11-30

Family

ID=30921240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7526486U Pending JPS62188137U (enrdf_load_stackoverflow) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPS62188137U (enrdf_load_stackoverflow)

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