JPS62186452A - Power transmitting circuit for electron microscope and the like - Google Patents
Power transmitting circuit for electron microscope and the likeInfo
- Publication number
- JPS62186452A JPS62186452A JP2588486A JP2588486A JPS62186452A JP S62186452 A JPS62186452 A JP S62186452A JP 2588486 A JP2588486 A JP 2588486A JP 2588486 A JP2588486 A JP 2588486A JP S62186452 A JPS62186452 A JP S62186452A
- Authority
- JP
- Japan
- Prior art keywords
- power
- multiphase
- electron microscope
- circuit
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 abstract description 12
- 108010083687 Ion Pumps Proteins 0.000 abstract description 9
- 230000001133 acceleration Effects 0.000 abstract description 5
- 102000006391 Ion Pumps Human genes 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
Landscapes
- Power Conversion In General (AREA)
- Ac-Ac Conversion (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は超高圧電子顕鏡等の電気系に係り、特に高電圧
部へのパワー伝送に好適な回路に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the electrical system of ultra-high voltage electron microscopes and the like, and particularly to a circuit suitable for transmitting power to a high voltage section.
〔従来の技術〉
従来、電子類＊ａの電子鏡部の熱電子用フィラメントの
パワー伝送に高電圧のフィルターコンデンサーを利用し
て送る方法が知られている。[Prior Art] Conventionally, a method is known in which a high-voltage filter capacitor is used to transmit power to a thermionic filament in an electron mirror section of electronics*a.
上記従来技術では、フィルターコンデンサーの高電圧側
と低電圧側にトランスを接続し、低電圧側のトランスに
電力を供給し、高電圧側のトランス側から高電圧レベル
での電力を取出している。In the above conventional technology, a transformer is connected to the high voltage side and the low voltage side of the filter capacitor, power is supplied to the low voltage side transformer, and power at a high voltage level is extracted from the high voltage side transformer side.
この時、伝送効率を上げるため、直列共振条件になるよ
う調整しているが、それでも、加速電圧、１．０００
ｋＶの電子顕微鏡で、フィラメント点灯のため、ＩＯＷ
の出力が必要とすれば、低電圧側で約５０Ｗの電力を供
給する必要がある。加速電圧が更に高くなって、フィル
ターコンデンサーの段数を多くすれば、供給電力は更に
必要となり、従来の方法では実用的ではなくなる。At this time, in order to increase the transmission efficiency, adjustments are made to achieve series resonance conditions, but even so, the accelerating voltage is 1.000.
With a kV electron microscope, IOW is used to light the filament.
If an output of 1 is required, it is necessary to supply approximately 50 W of power on the low voltage side. If the accelerating voltage becomes higher and the number of filter capacitor stages increases, more power will be required, making the conventional method impractical.
本発明の目的は、加速電圧の高い電子顕微鏡において、
低電圧側から高電圧側に効率の良いパワーの伝送をする
ことにある。The purpose of the present invention is to provide an electron microscope with a high acceleration voltage.
The goal is to efficiently transmit power from the low voltage side to the high voltage side.
上記目的は、高域フィルターを多段に重ねた回路を用い
、インピーダンス整合の状態で使用することにより達成
される。The above object is achieved by using a circuit in which high-pass filters are stacked in multiple stages and are used in a state of impedance matching.
コンデンサーとインダクタンスを組合せた高域フィルタ
ー回路を多段に組合せることにより、多段に重ねたコン
デンサーで高電圧の絶縁を可能にし、コンデンサーとイ
ンダクタンスで決まる特定の周波数よりも高い周波数で
、この回路を整合のとれた状態で駆動することにより、
低電圧側から高電圧側に効率の良いパワー伝送が可能で
ある。By combining multiple stages of high-pass filter circuits that combine capacitors and inductances, it is possible to isolate high voltages using multiple stages of capacitors, and this circuit can be matched at frequencies higher than the specific frequency determined by the capacitors and inductances. By driving in a balanced state,
Efficient power transmission from the low voltage side to the high voltage side is possible.
以下、本発明の一実施例を第１図により説明する。１は
超高圧電子顕微鏡等に用いられる多段加速管である。図
示はされていないが、この加速管にコックロフトウオル
トン回路等により発生されたｖ３に相等する高電圧が印
加されている。加速電圧が高くなって、例えば、加速管
の段数が１００段以上を越えるような場合、加速管全体
が長くなるため、排気抵抗が大きくなり、通常の電子顕
微鏡のように、加速管の零電位側だけから排気したので
は、加速管の高電圧側が必要充分な真空度に達しない場
合が考えられ、電子線を得るための電子鏡のフィラメン
トを点灯するのに支障をきたすことになる。第１図では
、加速管最高電圧Ｖｓの部分と要所２ケ処、Ｖｚ、Ｖｘ
にイオンポンプ２．２’ 、２’を配し、加速管内の排
気を行うようにし、加速管内の必要な真空度を得るよう
にしている。イオンポンプを駆動するための電源３゜３
１．３１が設けられている。これらの電源を駆動するた
めのパワーを効率良く伝送するための回路として、コン
デンサー４ ｌＨ４ｚ・＝４ｎ、４ｔ’ ｓ４２′・・
・４ｎ′ とインダクタンス５ｔ、 ５ｍ・・・５ｒ＋
１上りなる高域フィルターを利用した回路が設けられて
いる。６は高周波電源で、これからパワーが供給される
。７はイオンポンプ制御部で、光フアイバー束８を通し
てイオンポンプ制御を行う。今、コンデンサー４１１４
ｚ・・・４ □ｒ ４１’ ｙ ４２’・・・４ｎ。An embodiment of the present invention will be described below with reference to FIG. 1 is a multi-stage accelerator tube used in ultra-high voltage electron microscopes and the like. Although not shown, a high voltage equivalent to v3 generated by a Cockroft-Walton circuit or the like is applied to this accelerator tube. When the accelerating voltage becomes high and the number of stages of the accelerating tube exceeds 100, for example, the entire accelerating tube becomes longer, the exhaust resistance increases, and the If exhaust is exhausted only from the side, the high voltage side of the accelerator tube may not reach the necessary and sufficient degree of vacuum, which will cause problems in lighting the filament of the electron mirror used to obtain the electron beam. In Fig. 1, the part of the accelerator tube maximum voltage Vs and two important points, Vz, Vx
Ion pumps 2.2' and 2' are arranged to evacuate the inside of the acceleration tube to obtain the necessary degree of vacuum inside the acceleration tube. Power supply for driving the ion pump 3゜3
1.31 is provided. As a circuit for efficiently transmitting the power to drive these power supplies, capacitors 4 lH4z・=4n, 4t's42'...
・4n' and inductance 5t, 5m...5r+
A circuit using a high-pass filter is provided. 6 is a high frequency power supply, from which power is supplied. Reference numeral 7 denotes an ion pump control section which controls the ion pump through an optical fiber bundle 8. Now capacitor 4114
z...4 □r 41' y 42'...4n.
インダクタンス５ｔｙ ５２・・・５ｎ−１よりなる回
路の伝送効率を検討してみる。第２図に１段の高域フィ
ルター回路を示す。コンデンサー１ケの容量を２Ｃ、イ
ンダクタンスをＬとすると、西端子回路理論によれば、
ＪωＱ ｊＱ
とすれば、影像インピーダンスＺ！は、Ｚ ｘ＝ｒυ丁
７７５ ・・・（２）となる。ここに、、
ｊ＝ｆｆ〒、ω＝２πｆ Ｃｆは回路駆動周波数）、Ｑ
はＱ−値である。Let us examine the transmission efficiency of a circuit consisting of inductances 5ty, 52...5n-1. Figure 2 shows a one-stage high-pass filter circuit. If the capacitance of one capacitor is 2C and the inductance is L, then according to the west terminal circuit theory, if JωQ jQ, then the image impedance Z! is Zx=rυd775 (2). Here,,
j=ff〒, ω=2πf Cf is the circuit driving frequency), Q
is the Q-value.
（２）に（１）を代入して Ｑ〉〉１で Ｌｃ ω また、計算は略方が、伝播定数の実数部αはとなる。Substituting (1) into (2) Q〉〉1 Lc ω In addition, the real part α of the propagation constant is roughly calculated as follows.
具体的な例としてｃ ＝１７００Ｐ Ｆ 、 ｉ ｏ＝
１． ＯＯｋ Ｈｚとすると、
ｃ （１１０” １．７ Ｘ １０−”４ π”Ｘ
１０”＝ １ 、４９ ｍ Ｈ
ｆ＝１．４ｆｏとすると、Ｑ＝０．７．Ｑ”＝０．５０
．７ ０．５７
Ｑｘ 為＝７７−９ °°°０°２＝１．１５に
Ω ・・・（７）第１図で
、加速電圧５，０００ｋＶ程度のものを想定して、高域
フィルター回路の段数ｎ ＝ １５０段、Ｑ＝１５０と
すれば、ｅ−ｎ″＝θ−０・＋５７＝０．５７となり、
パワー伝送比は、０．５７” ＝０．３２となる。この
程度の伝送比と、影像インピーダンスであれば、ＩＯＷ
や２０Ｗ程度のパワーは充分に供給可能であり、実用に
供してはなはだ並太である。又１図示されているように
、回路の途中からパワーを取出して必要な処に供給する
ことも可能テする。第１図では、加速管排気のためのイ
オンポンプ駆動電源へのパワー供給の場合を記したが、
この他に、電子源のフィラメント点灯パワーの供給、そ
の他高電圧側に設けられた電気回路へのパワー供給が可
能である。As a specific example, c = 1700P F , io =
1. If OOkHz, c (110" 1.7 X 10-"4 π"X
10"=1, 49 m H f=1.4fo, then Q=0.7.Q"=0.50
．． 7 0.57 Qx = 77-9 °°°0°2 = 1.15Ω... (7) In Figure 1, assuming an accelerating voltage of about 5,000 kV, the high-pass filter circuit If the number of stages n = 150 stages and Q = 150, then e-n'' = θ-0・+57 = 0.57,
The power transmission ratio is 0.57" = 0.32. With this level of transmission ratio and image impedance, IOW
It is possible to sufficiently supply a power of about 20 W, and it is extremely large for practical use. Furthermore, as shown in Figure 1, it is also possible to extract power from the middle of the circuit and supply it where it is needed. Figure 1 shows the case of power supply to the ion pump drive power source for accelerator tube exhaust.
In addition, it is possible to supply power for lighting the filament of an electron source and to supply power to other electric circuits provided on the high voltage side.
本発明によれば、高電圧部に効率良いパワー伝送ができ
るので、従来方式ではできなかったような超高圧、例え
ば、加速電圧５，０００ ｋ Ｗ位の超高電圧部に設け
られた。フィラメントの点灯、イオンポンプの駆動、あ
るいはモーター駆動等のためのパワーを供給することが
できる。According to the present invention, it is possible to efficiently transmit power to a high voltage section, so that it can be installed in an ultra-high voltage section that cannot be achieved with conventional methods, for example, an ultra-high voltage section with an accelerating voltage of about 5,000 kW. It can supply power for lighting filaments, driving ion pumps, driving motors, etc.
第１図は本発明の一実施例の構成図、第２図は本発明の
説明図である。
１・・・加速管、４１．４２・・・４ ｎ ｇ ４ ｉ
’ ｐ ４ ｚ ’・・・４、′・・・コンデンサー
、５ ｘ、 ５ ｚ、・・・５ｎｚ・・・インダクタン
ス、６・・・高周波電源、２．２’ 、２’・・・イオ
ンポンプ、３．３’ 、３”・・・イオンポンプ駆動電
源。FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is an explanatory diagram of the present invention. 1... Accelerator tube, 41.42...4 n g 4 i
' p 4 z '... 4, '... Capacitor, 5 x, 5 z,... 5 nz... Inductance, 6... High frequency power supply, 2.2', 2'... Ion pump , 3.3', 3''...Ion pump drive power supply.
Claims (1)
設けられた電気回路に低電圧側からパワーを伝送するた
めの回路において、高域フィルターを多段に重ねインピ
ーダンス整合の状態で使用することを特徴とする電子顕
微鏡等のパワー伝送回路。1. High-pass filters are stacked in multiple stages and used in a state of impedance matching in a circuit for transmitting power from the low voltage side to the top stage of a multi-stage accelerator tube such as an electron microscope or in the middle thereof. A power transmission circuit for electron microscopes, etc., characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2588486A JPS62186452A (en) | 1986-02-10 | 1986-02-10 | Power transmitting circuit for electron microscope and the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2588486A JPS62186452A (en) | 1986-02-10 | 1986-02-10 | Power transmitting circuit for electron microscope and the like |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186452A true JPS62186452A (en) | 1987-08-14 |
Family
ID=12178208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2588486A Pending JPS62186452A (en) | 1986-02-10 | 1986-02-10 | Power transmitting circuit for electron microscope and the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186452A (en) |
-
1986
- 1986-02-10 JP JP2588486A patent/JPS62186452A/en active Pending
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