JPS62186432U - - Google Patents
Info
- Publication number
- JPS62186432U JPS62186432U JP7575986U JP7575986U JPS62186432U JP S62186432 U JPS62186432 U JP S62186432U JP 7575986 U JP7575986 U JP 7575986U JP 7575986 U JP7575986 U JP 7575986U JP S62186432 U JPS62186432 U JP S62186432U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing apparatus
- switching valve
- wafers
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7575986U JPS62186432U (OSRAM) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7575986U JPS62186432U (OSRAM) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186432U true JPS62186432U (OSRAM) | 1987-11-27 |
Family
ID=30922200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7575986U Pending JPS62186432U (OSRAM) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186432U (OSRAM) |
-
1986
- 1986-05-20 JP JP7575986U patent/JPS62186432U/ja active Pending
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