JPS62186361U - - Google Patents
Info
- Publication number
- JPS62186361U JPS62186361U JP7417986U JP7417986U JPS62186361U JP S62186361 U JPS62186361 U JP S62186361U JP 7417986 U JP7417986 U JP 7417986U JP 7417986 U JP7417986 U JP 7417986U JP S62186361 U JPS62186361 U JP S62186361U
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- magnetic poles
- charged particle
- particle beam
- orthogonal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7417986U JPS62186361U (enExample) | 1986-05-17 | 1986-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7417986U JPS62186361U (enExample) | 1986-05-17 | 1986-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186361U true JPS62186361U (enExample) | 1987-11-27 |
Family
ID=30919159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7417986U Pending JPS62186361U (enExample) | 1986-05-17 | 1986-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186361U (enExample) |
-
1986
- 1986-05-17 JP JP7417986U patent/JPS62186361U/ja active Pending