JPS62186352U - - Google Patents
Info
- Publication number
- JPS62186352U JPS62186352U JP7268486U JP7268486U JPS62186352U JP S62186352 U JPS62186352 U JP S62186352U JP 7268486 U JP7268486 U JP 7268486U JP 7268486 U JP7268486 U JP 7268486U JP S62186352 U JPS62186352 U JP S62186352U
- Authority
- JP
- Japan
- Prior art keywords
- source
- ion
- utility
- model registration
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268486U JPS62186352U (no) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268486U JPS62186352U (no) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186352U true JPS62186352U (no) | 1987-11-27 |
Family
ID=30916353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268486U Pending JPS62186352U (no) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186352U (no) |
-
1986
- 1986-05-16 JP JP7268486U patent/JPS62186352U/ja active Pending