JPS62186351U - - Google Patents
Info
- Publication number
- JPS62186351U JPS62186351U JP7268386U JP7268386U JPS62186351U JP S62186351 U JPS62186351 U JP S62186351U JP 7268386 U JP7268386 U JP 7268386U JP 7268386 U JP7268386 U JP 7268386U JP S62186351 U JPS62186351 U JP S62186351U
- Authority
- JP
- Japan
- Prior art keywords
- source
- ion
- magnet magnetic
- ion implantation
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 3
- 239000011810 insulating material Substances 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268386U JPS62186351U (enExample) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268386U JPS62186351U (enExample) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186351U true JPS62186351U (enExample) | 1987-11-27 |
Family
ID=30916351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268386U Pending JPS62186351U (enExample) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186351U (enExample) |
-
1986
- 1986-05-16 JP JP7268386U patent/JPS62186351U/ja active Pending