JPS62185217A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPS62185217A
JPS62185217A JP2673986A JP2673986A JPS62185217A JP S62185217 A JPS62185217 A JP S62185217A JP 2673986 A JP2673986 A JP 2673986A JP 2673986 A JP2673986 A JP 2673986A JP S62185217 A JPS62185217 A JP S62185217A
Authority
JP
Japan
Prior art keywords
head
magnetic
dummy
heads
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2673986A
Other languages
Japanese (ja)
Inventor
Yumie Imanishi
今西 由美恵
Norifumi Makino
憲史 牧野
Makoto Iwagami
誠 岩上
Shinichi Hara
真一 原
Toyonari Sasaki
豊成 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2673986A priority Critical patent/JPS62185217A/en
Publication of JPS62185217A publication Critical patent/JPS62185217A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • G11B5/3133Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To improve the yield for manufacturing a head, and to execute a mass production at a low cost by providing a dummy head having the almost same structure as a head element, on both ends of plural head element arrays on a substrate. CONSTITUTION:Dummy heads 11A, 11B having the same constitution as head elements 8A, 8B are formed one by one on both sides of both end heads 8A, 8A. These dummy heads 11A, 11B are formed simultaneously together with the head elements 8A, 8B by a thin film accumulating method and a photolithography technique. The dummy heads 11A, 11B are not used for recording and reproduction fundamentally, therefore, it is unnecessary to execute a connection. In this way, in a manufacturing process of a magnetic head, a damage which is suffered at the time of adhesion, etc., of a protective plate is shared with the dummy heads 11A, 11B, and it is prevented that an influence of an uneven abrasion which is suffered in a process of use is exerted on the original head elements 8A, 8B, and a non-defective product can be produced with a high yield.

Description

【発明の詳細な説明】 〔産業上の利用分野] 本発明は薄膜磁気ヘッドに係り、さらに詳しくは同一の
基板上に複数のヘッド素子を薄膜技術により形成してな
る薄膜磁気ヘッドに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a thin film magnetic head, and more particularly to a thin film magnetic head in which a plurality of head elements are formed on the same substrate by thin film technology. .

[従来の技術] 静止画像の記録再生を行うスチルビデオフロッピーは、
ディスクの2トラック分で、lフレームのビデオ信号の
記録再生を行うものである。従って、この種の装置に用
いる磁気ヘッドは、2トラック単位の磁気記録再生がで
、きる必要がある。
[Prior art] A still video floppy that records and plays still images is
One frame of video signal is recorded and reproduced on two tracks of the disc. Therefore, the magnetic head used in this type of device must be able to perform magnetic recording and reproduction in units of two tracks.

薄膜磁気ヘッドは、蒸着法あるいはスパッタリング法と
いった薄膜堆積法と、フォトリソグラフィー技術により
形成されるもので、従来のバルク型ヘッドに比べ、高密
度化が可能で、かつ小型化、低クロストークが実現でき
るため、マルチトラフ磁気ヘッドとして用いられるよう
になった。
Thin-film magnetic heads are formed using thin-film deposition methods such as evaporation or sputtering, and photolithography technology, and can achieve higher density, smaller size, and lower crosstalk than conventional bulk-type heads. Because of this, it came to be used as a multi-trough magnetic head.

これらの特長を生かし、近年、計算機用メモリの磁気ヘ
ッドについで、ビデオフロッピー用の2チヤンネル薄膜
磁気ヘツドも商品化されつつある。
Taking advantage of these features, in recent years, two-channel thin film magnetic heads for video floppies have been commercialized in addition to magnetic heads for computer memories.

第2図に、従来の1チヤンネルf8N膜磁気ヘツドの一
例を示す、第2図において、符号lで示すものは磁性基
板で、その上にコイル導体2が渦巻状に形成されている
。゛さらに、上部磁性層3“及び電極4がその上に固定
されている。磁極部5の先端部と基板lの間が磁性ギャ
ップ6である。ここに示した磁気ヘッドは2チヤンネル
ヘツドであるから、上記各部材はそれぞれ2つづつ磁性
基板l上に設けられる。
FIG. 2 shows an example of a conventional one-channel f8N film magnetic head. In FIG. 2, reference numeral 1 indicates a magnetic substrate on which a coil conductor 2 is formed in a spiral shape. Furthermore, an upper magnetic layer 3'' and an electrode 4 are fixed thereon. A magnetic gap 6 exists between the tip of the magnetic pole part 5 and the substrate l. The magnetic head shown here is a two-channel head. Therefore, two of each of the above members are provided on the magnetic substrate l.

上述の構造は薄膜堆積法とフォトリソグラフィーにより
形成され、続いて保護板7を接着後、記録媒体との接触
部に研削などの機械加工を施す成形工程が行われる。
The above-mentioned structure is formed by a thin film deposition method and photolithography, and then, after adhering the protective plate 7, a molding process is performed in which the contact portion with the recording medium is subjected to mechanical processing such as grinding.

このような薄膜磁気ヘッドを用いて記録を行う場合には
、電極4を通して、導体2に記録電流を流すことにより
、磁気ギャップ6に磁界を発生させ、ギャップ部近傍に
位置する図示していない磁気記録媒体を記録磁化させる
When recording using such a thin-film magnetic head, a magnetic field is generated in the magnetic gap 6 by passing a recording current through the conductor 2 through the electrode 4, and a magnetic field (not shown) located near the gap is generated. The recording medium is magnetized for recording.

一方、磁気記録の再生時には、磁気ギャップ6付近に位
置する磁気記録媒体の記録磁化部分から発生する磁束が
磁性基板lと上部磁性層3を通って導体2と電極4を交
差し、この磁束が磁気記録媒体の移動に伴って変化する
ため、導体2.4に起電力が生じ、この電圧を検出する
ことにより再生が行われる。
On the other hand, during reproduction of magnetic recording, the magnetic flux generated from the recorded magnetized portion of the magnetic recording medium located near the magnetic gap 6 passes through the magnetic substrate l and the upper magnetic layer 3, crosses the conductor 2 and the electrode 4, and this magnetic flux Since the voltage changes as the magnetic recording medium moves, an electromotive force is generated in the conductor 2.4, and reproduction is performed by detecting this voltage.

こうして2チヤンネル薄膜磁気ヘツドは、磁気ディスク
のトラック方向に移動させることで何枚もの静止画像を
記録再生できるわけだが、さらに現在、2チヤンネルヘ
ツドをいくつが並列に並べた、いわゆる薄膜マルチトラ
ック磁気ヘッドが考え出されており、これによりアクセ
スタイムが長い、高精度な駆動系が必要、トラックズレ
を起こしやすいなどの問題が解消されようとしている。
In this way, a 2-channel thin-film magnetic head can record and reproduce many still images by moving it in the track direction of a magnetic disk.Currently, so-called thin-film multi-track magnetic heads, in which several 2-channel heads are arranged in parallel, are used. has been devised, and this will solve problems such as long access times, the need for a high-precision drive system, and the tendency to cause track misalignment.

[発明が解決しようとする問題点] ところが、この薄膜マルチトラック磁気ヘッドは、両端
ヘッドの歩留まりが統計的にみて、非常に悪く、またそ
の耐久性には問題がある。その原因として、製造工程に
よる両端ヘッド特性劣化。
[Problems to be Solved by the Invention] However, in this thin film multi-track magnetic head, the yield of heads at both ends is statistically very poor, and there are problems with its durability. The cause of this is deterioration of head characteristics at both ends due to the manufacturing process.

そして使用過程におけるディスク特有の内側と外側の周
速差にもとづく耐摩耗性不拘−が挙げられる。
Another problem is the wear resistance, which is based on the difference in circumferential speed between the inner and outer surfaces of the disk during use.

次に図に基づきそれを説明するが、第2図と同一部分ま
たは相当する部分には同一符号を付し、その説明は省略
する。
Next, this will be explained based on the drawings, and the same parts as in FIG. 2 or corresponding parts are given the same reference numerals, and the explanation thereof will be omitted.

第3図(A)、(B)は、マルチトラック磁気ヘッド製
造過程における両端ヘッドの特性劣化を示す、ここでは
基板1に薄膜堆積法と、フォトリソグラフィーにより形
成された、上部磁性層3、磁気ギャップ6、その他から
成るヘッド素子8A 、8B上に保護板7を接着する様
子を磁気記録媒体の摺動面方向から示している。ここで
符号8Aは、基板上に配列されたヘッドのうち、両端の
ヘッド素子、8Bはその他のヘッド素子を示す。
3(A) and 3(B) show the characteristic deterioration of the head at both ends during the manufacturing process of the multi-track magnetic head. The bonding of the protective plate 7 onto the head elements 8A and 8B consisting of the gap 6 and others is shown from the direction of the sliding surface of the magnetic recording medium. Here, reference numeral 8A indicates head elements at both ends of the heads arranged on the substrate, and reference numeral 8B indicates other head elements.

第3図(A)に図示するように、保護板の接着工程では
、磁性基板l上に溶融状態のガラス9を藏せ、その上か
ら保護板7を圧着するわけであるが、この際の加熱、加
圧によって、第3図(B)に示すように保護板7が極端
にたわみ、基板両端のヘッド素子8Aが過大な負荷を受
け、劣化する。
As shown in FIG. 3(A), in the process of bonding the protective plate, molten glass 9 is placed on top of the magnetic substrate l, and the protective plate 7 is pressed onto it. Due to heating and pressurization, the protection plate 7 is extremely bent as shown in FIG. 3(B), and the head elements 8A at both ends of the substrate are subjected to an excessive load and deteriorate.

一方、第4図(A)、(B)は、使用過程での記録媒体
との摩耗を示している。即ち、ヘッドの使用過程ではヘ
ッド素子8A 、8B先端のギャップ部6が他に比べて
軟かいため、第4図(A)に示すようにヘッドに磁気記
録媒体loを摺動させると、記録媒体10との摩擦によ
り、ギヤツブ部6近傍が徐々に研摩される。ところが、
ギャップ以外は硬く、研摩されにくいため、第4図(B
)のように、基板の端部領域と隣接する両端ヘッド素子
8A部分と、それ以外のヘッド素子8B部分とでは摩耗
性に差が出て、媒体摺動面が不均一になる。この不均一
によりギャップ深さの不揃いが生じ、各チャンネルのヘ
ッドの記録再生特性にばらつきを生じる問題がある。
On the other hand, FIGS. 4(A) and 4(B) show wear on the recording medium during use. That is, in the process of using the head, the gap portion 6 at the tip of the head elements 8A, 8B is softer than the others, so when the magnetic recording medium lo is slid on the head as shown in FIG. 4(A), the recording medium Due to the friction with 10, the vicinity of gear lug portion 6 is gradually polished. However,
The parts other than the gap are hard and difficult to polish, so
), there is a difference in abrasion resistance between the both-end head element 8A portion adjacent to the end region of the substrate and the other head element 8B portion, and the medium sliding surface becomes non-uniform. This non-uniformity causes non-uniformity in gap depth, which causes a problem of variation in the recording and reproducing characteristics of the heads of each channel.

[問題点を解決するための手段] 以上のような問題点を解決するため本発明においては、
磁性基板上に複数のヘッド素子を薄膜技術により形成し
て成る薄膜磁気ヘッドにおいて、前記基板上の複数のヘ
ッド素子配列の両端にヘッド素子とほぼ同様の構造を有
するダミーヘッドを設けた構成を採用した。
[Means for solving the problems] In order to solve the above problems, in the present invention,
A thin-film magnetic head in which a plurality of head elements are formed on a magnetic substrate using thin-film technology, employs a configuration in which dummy heads having a structure substantially similar to the head elements are provided at both ends of an array of the plurality of head elements on the substrate. did.

[作 用] 以上のWIr#:、によれば、磁気へ−Iドの製造過程
においては、保護板の接着時などに受けるダメージをダ
ミーヘッドに受は持たせ、また使用過程において受ける
偏摩耗の影響が本来のヘッド素子に及ばないようにでき
る。
[Function] According to the above WIr#:, in the manufacturing process of the magnetic head, the dummy head is made to bear the damage caused when the protective plate is bonded, and the uneven wear caused in the process of use is can be prevented from affecting the original head element.

[実施例] 以下、図面に示す実施例に基づき、本発明の詳細な説明
する。
[Example] Hereinafter, the present invention will be described in detail based on the example shown in the drawings.

第1図は本発明によるマルチトラックの薄膜磁気ヘッド
の一実施例を示したもので、図において符号lは、従来
例同様磁性基板lを示している。
FIG. 1 shows an embodiment of a multi-track thin film magnetic head according to the present invention, and in the figure, the reference numeral 1 indicates a magnetic substrate 1 as in the conventional example.

本実施例では、4チヤンネルの薄膜磁気ヘッドを構成す
るため、基板1上には従来と同様の方法でコイル導体2
.上部磁性層3.電極4から成るヘッド素子8A 、8
Bを4個形成しである。ここで、符号8A 、8Bはそ
れぞれ両端ヘッドと、その他の中間部のヘッドを示す。
In this embodiment, in order to configure a 4-channel thin film magnetic head, coil conductors 2 are placed on the substrate 1 in the same manner as in the past.
.. Upper magnetic layer 3. Head elements 8A, 8 consisting of electrodes 4
Four pieces B are formed. Here, numerals 8A and 8B respectively indicate the heads at both ends and the other intermediate head.

さらに、第1図の例では、両端へラド8A。Furthermore, in the example of FIG. 1, rads 8A are attached to both ends.

8Aの両側に、さらにヘッド素子8A 、8Bと同一の
構成を有するダミーヘッドIIA、IIBを1つづつ形
成しである。これらのダミーへラド11A、IIBはヘ
ッド素子8A、8Bとともに薄膜堆積法及びフォトリソ
グラフィー技術により同時に形成する。ダミーヘッドI
IA、IIBは基本的には記録再生に用いないので、結
線する必要がなく、場合によってはダミーヘッドはコイ
ル導体2.上部磁性層3.電極4などの異なる部材から
構成しなくてもよく、ヘッド素子8A 、 8Bと同形
状の適当な磁性材などから膜形成することにしてもよい
One dummy head IIA and one IIB having the same configuration as the head elements 8A and 8B are further formed on both sides of the head element 8A. These dummy pads 11A and IIB are formed simultaneously with the head elements 8A and 8B by thin film deposition and photolithography. Dummy head I
Since IA and IIB are basically not used for recording and reproduction, there is no need to connect them, and in some cases, the dummy head is connected to the coil conductor 2. Upper magnetic layer 3. The electrodes 4 and the like do not need to be composed of different members, and may be formed of a suitable magnetic material having the same shape as the head elements 8A and 8B.

以−Lのような構成によれば、磁性基板lを従来より幅
広に形成する必要があるが、従来よりも薄膜マルチトラ
ックヘッドの生産性及び耐久性を大きく向上させること
ができる。
According to the configuration as shown in FIG. 1, although it is necessary to make the magnetic substrate l wider than before, the productivity and durability of the thin film multi-track head can be greatly improved than before.

即ち、製造工程において、前記第3図(A)。That is, in the manufacturing process, the above-mentioned FIG. 3(A).

(B)に示すように保護板7を接着する場合には、保護
板7の反り、たわみにより受ける劣化は基板両端のダミ
ーヘッドIIA、IIBが受は持つことになるので、実
際の両端へラド8A、8Aは影響を受けることがない。
When the protective plate 7 is bonded as shown in (B), the deterioration caused by the warping and bending of the protective plate 7 will be handled by the dummy heads IIA and IIB at both ends of the board, so it will not be possible to reduce the deterioration caused by the warping and bending of the protective plate 7. 8A and 8A are not affected.

したがって、複雑な製造工程を′採用することなく、従
来と同様の設備で歩留まり良く良品を生産することがで
きる。
Therefore, it is possible to produce good products with high yield using the same equipment as in the past without employing complicated manufacturing processes.

またヘッドの使用過程においても、前記第4図(A)、
(B)のように磁気記録媒体を摺動させた場合、偏摩耗
の影響を受けるのは基板両端のダミーへラド11A、1
1Bであり、中間部の4つのヘッド素子8A 、8Bは
全てほぼ同様の速度で摩耗する。従って従来のようにギ
ャップ深さの不均一から生じる各チャンネルの記録再生
特性のばらつきを起すことなく、長期間にわたって安定
した記録再生特性を維持できる。
Also, in the process of using the head, the above-mentioned FIG. 4(A),
When the magnetic recording medium is slid as shown in (B), the dummy disks 11A and 1 at both ends of the substrate are affected by uneven wear.
1B, and the four intermediate head elements 8A and 8B all wear out at approximately the same rate. Therefore, stable recording and reproducing characteristics can be maintained over a long period of time without causing variations in the recording and reproducing characteristics of each channel due to non-uniform gap depths as in the conventional case.

以上の実施例では、4チヤンネルヘツドを例示し、その
両端にそれぞれ1つづつダミーヘッドを設ける構成を示
したが、ヘッド素子の数N、ダミーヘッドの数nl+n
2については、これに限定されず種々の変形例が考えら
れる。
In the above embodiment, a four-channel head is illustrated, and one dummy head is provided at each end of the head. However, the number of head elements is N, and the number of dummy heads is nl+n.
2 is not limited to this, and various modifications can be considered.

まず、ダミーへラドIIA、IIBの数n1pn2はn
1=n2=2、あるいはそれ以上としても良く、その場
合には製造時の変形、あるいは媒体摺動時の偏摩耗の影
響に対する本来のヘッド素子8A 、8Bの安定性を大
きく向上できる。実際にはダミーヘッドをあまり多数設
けるのは現実的ではないので、3個程度までが望ましい
、ダミーヘッドの数はへラドル媒体間の相対速度、ヘッ
ド素子の材質などにより適宜定めれば良い。
First, the number n1pn2 of dummy data IIA and IIB is n
1=n2=2 or more. In that case, the original stability of the head elements 8A and 8B against the influence of deformation during manufacturing or uneven wear during sliding of the medium can be greatly improved. In reality, it is not practical to provide too many dummy heads, so it is desirable to have up to three dummy heads.The number of dummy heads may be determined as appropriate depending on the relative speed between the paddle media, the material of the head element, etc.

また、ダミーヘッドIIA、IIBは両端に設けなくて
も良く、片側を省略することもできる。即ちダミーヘッ
ドの数n1またはn2をnl(n2)=0ととり、Oで
ない方のnt  (n2)を1〜3程度の値から適当な
値に選んでも良い。
Further, the dummy heads IIA and IIB do not need to be provided at both ends, and one side can be omitted. That is, the number n1 or n2 of the dummy heads may be set as nl(n2)=0, and nt(n2), which is not O, may be selected as an appropriate value from about 1 to 3.

あるいはnl、n2を1〜3程度の値から選び、nr+
n2としても良い、このような非対称構造は、例えばス
チルビデオフロッピーディスク装置などにおいて、ディ
スクの内周と外周で周速差があり、内周側のヘッド素子
と外周側のヘッド素子で摩耗条件が異なる場合に均一な
摩耗特性を得るために有用なものである。この場合、も
ちろん基板のディスク外周側の周速の大きい側に多くダ
ミーヘッドを設けるのは言うまでもない。
Alternatively, select nl and n2 from values of about 1 to 3, and nr+
Such an asymmetric structure, which may also be referred to as n2, is used, for example, in a still video floppy disk device, etc., where there is a difference in circumferential speed between the inner and outer circumferences of the disk, and the wear conditions are different between the head elements on the inner and outer circumferences. It is useful for obtaining uniform wear characteristics in different cases. In this case, it goes without saying that a large number of dummy heads are provided on the outer peripheral side of the disk where the circumferential speed is high.

ヘッド素子の数Nについては制限はないが、変形、偏摩
耗防止効果を得ることを考えればNは少なくとも2以上
で、大きな値としてはスチルビデオフロッピーディスク
の全トラック数52程度(それ以上でも良い)までが考
えられる。具体的には、Nを現在のスチルビデオフロッ
ピーディスクのフルトラツク数52にとる場合を考える
と、ヘッド両端のダミーヘッドのanx、n2をnl+
12≧1(ないし2)程度にとれば前記の変形による素
子劣化及び偏摩耗防止の効果を充分達成できると考えら
れる。この程度(N=52)のマルチトラックヘッドの
全幅はたかだか51111程度であり、1〜2個程度の
ダミーヘッドを追加することは現在の薄膜形成技術によ
れば容易↑ある。
There is no limit to the number N of head elements, but in order to obtain the effect of preventing deformation and uneven wear, N should be at least 2 or more, and a large value is about 52, the total number of tracks on a still video floppy disk (or more). ) are possible. Specifically, assuming that N is the full track number 52 of the current still video floppy disk, anx and n2 of the dummy heads at both ends of the head are nl+
It is considered that if the ratio is about 12≧1 (or 2), the effect of preventing element deterioration and uneven wear caused by the deformation described above can be sufficiently achieved. The total width of a multi-track head of this size (N=52) is at most about 51,111 mm, and it is easy to add one or two dummy heads using current thin film forming technology.

本発明の構成はスチルビデオフロッピーディスク装置に
限定されることなく、種々の用途の薄膜磁気ヘッドに適
用できる。
The configuration of the present invention is not limited to still video floppy disk devices, but can be applied to thin film magnetic heads for various uses.

なお、上記ではダミーヘッドを結線せず、実際には用い
ないことにしたが、これを結線してヘッドの位置決めな
どの他の用途に用いることも考えられる。
In addition, in the above, the dummy head is not wired and is not actually used, but it is also possible to wire it and use it for other purposes such as head positioning.

[効 果] 以上の説明から明らかなように、本発明によれば、基板
上に複数のヘッド素子を薄膜技術により形成してなる薄
膜磁気ヘッドにおいて、前記基板上の複数のヘッド素子
配列の両端にヘッド素子とほぼ同様の構造を有するダミ
ーヘッドを設ける構成を採用しているので、ヘッド製造
の歩留まりを向上し、低コストで薄膜磁気ヘッドを大量
生産することが可能になるとともに、媒体搏動面の均一
な耐摩耗性により長期にわたって安定した磁気記録再生
を行なえる優れた効果を得ることができる。
[Effect] As is clear from the above description, according to the present invention, in a thin film magnetic head in which a plurality of head elements are formed on a substrate by thin film technology, both ends of the plurality of head element arrays on the substrate Since a dummy head having a structure similar to that of the head element is provided at the top of the head element, it is possible to improve the head manufacturing yield and mass-produce thin-film magnetic heads at low cost. Due to the uniform abrasion resistance of the material, an excellent effect of stable magnetic recording and reproduction over a long period of time can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による薄膜マルチトラック磁気ヘッドの
一実施例を示した磁気ヘッドの上面図、第2図は従来の
2チヤンネル薄膜磁気ヘツドの構造を説明する全体斜視
図、第3図(A)、CB)は、従来のマルチトラック磁
気ヘッド製造過程におけるヘッド特性劣化をそれぞれ説
明する磁気ヘッドの正面図、第4図(A)、(B)は、
従来のマルチトラック磁気ヘッド使用過程における耐摩
耗性不均一をそれぞれ説明する磁気シートを含めた上面
図である。 l・・・磁性基板   2・・・コイル導体3・・・上
部磁性層  4・・・電極 5・・・磁極部    6・・・磁気ギャップ7・・・
保護板    8A 、8B・・・・\ラド素子9・・
・接着ガラス 10・・・磁性媒体 11A、IIB・・・ダミーヘッド (A) (B) 磁気へ・・ノドの正面口 第3図 (A) (B) 衣l気へ、7ドの上面口 第4図
FIG. 1 is a top view of a magnetic head showing an embodiment of a thin film multi-track magnetic head according to the present invention, FIG. 2 is an overall perspective view illustrating the structure of a conventional two-channel thin film magnetic head, and FIG. ) and CB) are front views of the magnetic head, respectively, illustrating the deterioration of head characteristics in the conventional multi-track magnetic head manufacturing process, and FIGS. 4(A) and 4(B) are
FIG. 3 is a top view including a magnetic sheet, illustrating non-uniform wear resistance in the process of using a conventional multi-track magnetic head. l...Magnetic substrate 2...Coil conductor 3...Top magnetic layer 4...Electrode 5...Magnetic pole part 6...Magnetic gap 7...
Protective plate 8A, 8B...\RAD element 9...
・Adhesive glass 10...Magnetic media 11A, IIB...Dummy head (A) (B) To magnetism...Front opening of throat Figure 3 (A) (B) To air, top opening of 7th door Figure 4

Claims (1)

【特許請求の範囲】[Claims] 基板上に複数のヘッド素子を薄膜技術により形成して成
る薄膜磁気ヘッドにおいて、前記基板上の複数のヘッド
素子配列の両端にヘッド素子とほぼ同様の構造を有する
ダミーヘッドを設けたことを特徴とする薄膜磁気ヘッド
A thin film magnetic head comprising a plurality of head elements formed on a substrate by thin film technology, characterized in that a dummy head having a structure substantially similar to that of the head elements is provided at both ends of the plurality of head element arrays on the substrate. Thin film magnetic head.
JP2673986A 1986-02-12 1986-02-12 Thin film magnetic head Pending JPS62185217A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2673986A JPS62185217A (en) 1986-02-12 1986-02-12 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2673986A JPS62185217A (en) 1986-02-12 1986-02-12 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS62185217A true JPS62185217A (en) 1987-08-13

Family

ID=12201668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2673986A Pending JPS62185217A (en) 1986-02-12 1986-02-12 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS62185217A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170707A (en) * 1990-11-02 1992-06-18 Matsushita Electric Ind Co Ltd Multichannel magnetic head
JP2008056359A (en) * 2007-11-13 2008-03-13 Shikishima Baking Co Ltd Carry container

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170707A (en) * 1990-11-02 1992-06-18 Matsushita Electric Ind Co Ltd Multichannel magnetic head
JP2008056359A (en) * 2007-11-13 2008-03-13 Shikishima Baking Co Ltd Carry container

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