JPS62184741U - - Google Patents

Info

Publication number
JPS62184741U
JPS62184741U JP7118486U JP7118486U JPS62184741U JP S62184741 U JPS62184741 U JP S62184741U JP 7118486 U JP7118486 U JP 7118486U JP 7118486 U JP7118486 U JP 7118486U JP S62184741 U JPS62184741 U JP S62184741U
Authority
JP
Japan
Prior art keywords
semiconductor
workbench
hood
opened
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7118486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416434Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7118486U priority Critical patent/JPH0416434Y2/ja
Publication of JPS62184741U publication Critical patent/JPS62184741U/ja
Application granted granted Critical
Publication of JPH0416434Y2 publication Critical patent/JPH0416434Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP7118486U 1986-05-14 1986-05-14 Expired JPH0416434Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7118486U JPH0416434Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7118486U JPH0416434Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Publications (2)

Publication Number Publication Date
JPS62184741U true JPS62184741U (enrdf_load_stackoverflow) 1987-11-24
JPH0416434Y2 JPH0416434Y2 (enrdf_load_stackoverflow) 1992-04-13

Family

ID=30913507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7118486U Expired JPH0416434Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPH0416434Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0416434Y2 (enrdf_load_stackoverflow) 1992-04-13

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