JPS62184190U - - Google Patents

Info

Publication number
JPS62184190U
JPS62184190U JP7256486U JP7256486U JPS62184190U JP S62184190 U JPS62184190 U JP S62184190U JP 7256486 U JP7256486 U JP 7256486U JP 7256486 U JP7256486 U JP 7256486U JP S62184190 U JPS62184190 U JP S62184190U
Authority
JP
Japan
Prior art keywords
disks
turbo
rotating body
molecular pump
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7256486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7256486U priority Critical patent/JPS62184190U/ja
Publication of JPS62184190U publication Critical patent/JPS62184190U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP7256486U 1986-05-16 1986-05-16 Pending JPS62184190U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7256486U JPS62184190U (US08087162-20120103-C00010.png) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7256486U JPS62184190U (US08087162-20120103-C00010.png) 1986-05-16 1986-05-16

Publications (1)

Publication Number Publication Date
JPS62184190U true JPS62184190U (US08087162-20120103-C00010.png) 1987-11-21

Family

ID=30916122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7256486U Pending JPS62184190U (US08087162-20120103-C00010.png) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPS62184190U (US08087162-20120103-C00010.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508340A (ja) * 2008-11-07 2012-04-05 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプロータ
JP5541464B2 (ja) * 2009-02-18 2014-07-09 株式会社島津製作所 ターボ分子ポンプ
CN105697395A (zh) * 2014-12-15 2016-06-22 普发真空有限公司 用于真空泵的转子设施及其制造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508340A (ja) * 2008-11-07 2012-04-05 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプロータ
JP5541464B2 (ja) * 2009-02-18 2014-07-09 株式会社島津製作所 ターボ分子ポンプ
CN105697395A (zh) * 2014-12-15 2016-06-22 普发真空有限公司 用于真空泵的转子设施及其制造方法
JP2016114059A (ja) * 2014-12-15 2016-06-23 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの為のローター装置及びその製造方法

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