JPS62183628U - - Google Patents

Info

Publication number
JPS62183628U
JPS62183628U JP7212886U JP7212886U JPS62183628U JP S62183628 U JPS62183628 U JP S62183628U JP 7212886 U JP7212886 U JP 7212886U JP 7212886 U JP7212886 U JP 7212886U JP S62183628 U JPS62183628 U JP S62183628U
Authority
JP
Japan
Prior art keywords
sliders
transport ducts
vacuum
fixed
movable scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7212886U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7212886U priority Critical patent/JPS62183628U/ja
Publication of JPS62183628U publication Critical patent/JPS62183628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この考案の実施例を示す真空用搬送
装置の縦断側面図、第2図は、同装置の固定スラ
イダと可動スケールを示す要部縦断正面図、第3
図は同装置の固定スライダと可動スケールを示す
要部縦断側面図、第4図は、同装置の制御手段の
一例を示すブロツク図である。 2,3……搬送ダクト、4……固定スライダ、
5……可動スケール、a……被搬送物。
FIG. 1 is a longitudinal sectional side view of a vacuum transfer device showing an embodiment of this invention, FIG. 2 is a longitudinal sectional front view of the main parts showing a fixed slider and a movable scale of the same device, and FIG.
The figure is a vertical sectional side view of essential parts showing the fixed slider and movable scale of the same device, and FIG. 4 is a block diagram showing an example of the control means of the same device. 2, 3...Transport duct, 4...Fixed slider,
5... Movable scale, a... Object to be transported.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空の搬送ダクト2,3の中で被搬送物aを搬
送する装置において、搬送ダクト2,3の中の一
直線上に間隔をおいてリニアモータの固定スライ
ダ4,4…を配置し、少なくとも2つのスライダ
4,4…の間に跨ることができる長さを持つたリ
ニアモータの可動スケール5を、上記固定スライ
ダ4,4…に装着してなることを特徴とする真空
用搬送装置。
In a device for transporting a transported object a in vacuum transport ducts 2 and 3, fixed sliders 4, 4, etc. of linear motors are arranged at intervals on a straight line in the transport ducts 2 and 3, and at least two A vacuum conveying device characterized in that a movable scale 5 of a linear motor having a length capable of straddling between the two sliders 4, 4... is attached to the fixed sliders 4, 4....
JP7212886U 1986-05-14 1986-05-14 Pending JPS62183628U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7212886U JPS62183628U (en) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7212886U JPS62183628U (en) 1986-05-14 1986-05-14

Publications (1)

Publication Number Publication Date
JPS62183628U true JPS62183628U (en) 1987-11-21

Family

ID=30915306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7212886U Pending JPS62183628U (en) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPS62183628U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036222A (en) * 1983-08-05 1985-02-25 Irie Koken Kk Article conveying device under high-vaccum
JPS60104457A (en) * 1983-11-09 1985-06-08 日立機電工業株式会社 Conveyor using linear pulse motor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036222A (en) * 1983-08-05 1985-02-25 Irie Koken Kk Article conveying device under high-vaccum
JPS60104457A (en) * 1983-11-09 1985-06-08 日立機電工業株式会社 Conveyor using linear pulse motor

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