JPS62183091U - - Google Patents

Info

Publication number
JPS62183091U
JPS62183091U JP7138886U JP7138886U JPS62183091U JP S62183091 U JPS62183091 U JP S62183091U JP 7138886 U JP7138886 U JP 7138886U JP 7138886 U JP7138886 U JP 7138886U JP S62183091 U JPS62183091 U JP S62183091U
Authority
JP
Japan
Prior art keywords
screw
stage
rotor
rotor chamber
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7138886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7138886U priority Critical patent/JPS62183091U/ja
Publication of JPS62183091U publication Critical patent/JPS62183091U/ja
Pending legal-status Critical Current

Links

JP7138886U 1986-05-12 1986-05-12 Pending JPS62183091U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7138886U JPS62183091U (xx) 1986-05-12 1986-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7138886U JPS62183091U (xx) 1986-05-12 1986-05-12

Publications (1)

Publication Number Publication Date
JPS62183091U true JPS62183091U (xx) 1987-11-20

Family

ID=30913894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7138886U Pending JPS62183091U (xx) 1986-05-12 1986-05-12

Country Status (1)

Country Link
JP (1) JPS62183091U (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020162046A1 (ja) * 2019-02-06 2020-08-13 株式会社日立産機システム 多段スクリュー圧縮機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020162046A1 (ja) * 2019-02-06 2020-08-13 株式会社日立産機システム 多段スクリュー圧縮機
US11773853B2 (en) 2019-02-06 2023-10-03 Hitachi Industrial Equipment Systems Co., Ltd. Multi-stage screw compressor

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