JPS62182548U - - Google Patents
Info
- Publication number
- JPS62182548U JPS62182548U JP7026786U JP7026786U JPS62182548U JP S62182548 U JPS62182548 U JP S62182548U JP 7026786 U JP7026786 U JP 7026786U JP 7026786 U JP7026786 U JP 7026786U JP S62182548 U JPS62182548 U JP S62182548U
- Authority
- JP
- Japan
- Prior art keywords
- storage section
- position changing
- changing means
- section
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims 2
Description
図面はいずれも本考案の実施例を示すものであ
つて、第１図ａ，ｂ，ｃ及びｄは半導体移換えの
手段の概要を示す概略平面図、第２図は第１図ａ
の概略部分斜視図、第３図ａ，ｂ，ｃ，ｄ，ｅ及
びｆは半導体移換えの手順を示す断面図、第４図
は半導体移換え装置及びその周辺の要部平面図、
第５図は半導体移換え装置の要部正面図、第６図
は同じく要部斜視図、第７図はバスケツトの斜視
図、第８図は第７図の―線矢視断面図、第９
図はカートリツジの斜視図、である。
なお、図面に示された符号に於いて、１……カ
ートリツジ、１ａ……カートリツジの支柱、１ｂ
……凹部、２，２Ａ１，２Ａ２，２Ｂ１，２Ｂ２
……バスケツト、２ａ……つば、２ｂ……凹部、
３，３Ａ１，３Ａ２，３Ｂ１，３Ｂ２，４，４Ａ
１，４Ａ２，４Ｂ１，４Ｂ２……アーム、５，６
，２３……ウオームギアのホイル軸、７，８，２
１……ウオームギアボツクス、９，１０，１２，
１３，１７，１８……平歯車、１１，１４……ウ
オーム、１９，２０……スプラインシヤフト、２
３……バスケツト支持アーム、２４……モータ、
２７，２８……送り軸である。
The drawings all show embodiments of the present invention, and FIG.
3A, B, C, D, E and F are sectional views showing the steps of semiconductor transfer; FIG. 4 is a plan view of the main parts of the semiconductor transfer device and its surroundings;
FIG. 5 is a front view of the main parts of the semiconductor transfer device, FIG. 6 is a perspective view of the main parts, FIG. 7 is a perspective view of the basket, FIG.
The figure is a perspective view of the cartridge. In addition, in the symbols shown in the drawings, 1... Cartridge, 1a... Cartridge support, 1b
... recess, 2 , 2A 1 , 2A 2 , 2B 1 , 2B 2
...Basket, 2a...Brim, 2b...Recess,
3,3A 1 ,3A 2 ,3B 1 ,3B 2 ,4,4A
1 , 4A 2 , 4B 1 , 4B 2 ... Arm, 5, 6
, 23... Worm gear wheel shaft, 7, 8, 2
1... Worm gear box, 9, 10, 12,
13, 17, 18... Spur gear, 11, 14... Worm, 19, 20... Spline shaft, 2
3...Basket support arm, 24...Motor,
27, 28... are feed shafts.
Claims (1)
第二の収容部内を区劃し、前記第一の収容区分に
対応した第二の収容区分との両収容区分を相対的
に位置変更可能にする第一の位置変更手段と；半
導体を支持し、この半導体を前記第一の収容区分
と前記第二の収容区分との間で移換える支持手段
と；前記第一の収容区分及び前記第二の収容区分
に対応して前記支持手段を位置変更可能にする第
二の位置変更手段と；前記第一の位置変更手段の
動作と前記第二の位置変更手段の動作とを連動さ
せる連動手段と；を有する、半導体移換え装置。 A first storage section that partitions the inside of the first storage section;
a first position changing means that partitions the inside of the second housing section and allows the positions of both housing sections to be changed relative to the second housing section that corresponds to the first housing section; , support means for transferring the semiconductor between the first storage section and the second storage section; repositioning the support means in correspondence with the first storage section and the second storage section; A semiconductor transfer device, comprising: second position changing means for enabling; and interlocking means for interlocking the operation of the first position changing means and the operation of the second position changing means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026786U JPS62182548U (en) | 1986-05-09 | 1986-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026786U JPS62182548U (en) | 1986-05-09 | 1986-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182548U true JPS62182548U (en) | 1987-11-19 |
Family
ID=30911752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7026786U Pending JPS62182548U (en) | 1986-05-09 | 1986-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182548U (en) |
-
1986
- 1986-05-09 JP JP7026786U patent/JPS62182548U/ja active Pending