JPS62181519U - - Google Patents
Info
- Publication number
- JPS62181519U JPS62181519U JP7000186U JP7000186U JPS62181519U JP S62181519 U JPS62181519 U JP S62181519U JP 7000186 U JP7000186 U JP 7000186U JP 7000186 U JP7000186 U JP 7000186U JP S62181519 U JPS62181519 U JP S62181519U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- casing
- partition wall
- opening area
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070001U JPH0313465Y2 (fr) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986070001U JPH0313465Y2 (fr) | 1986-05-12 | 1986-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62181519U true JPS62181519U (fr) | 1987-11-18 |
| JPH0313465Y2 JPH0313465Y2 (fr) | 1991-03-27 |
Family
ID=30911236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986070001U Expired JPH0313465Y2 (fr) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313465Y2 (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116300U (ja) * | 1982-02-02 | 1983-08-08 | 日本電気株式会社 | コンベヤ装置 |
| JPS5994840A (ja) * | 1982-11-22 | 1984-05-31 | Hitachi Plant Eng & Constr Co Ltd | ウエハ搬送装置 |
-
1986
- 1986-05-12 JP JP1986070001U patent/JPH0313465Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116300U (ja) * | 1982-02-02 | 1983-08-08 | 日本電気株式会社 | コンベヤ装置 |
| JPS5994840A (ja) * | 1982-11-22 | 1984-05-31 | Hitachi Plant Eng & Constr Co Ltd | ウエハ搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0313465Y2 (fr) | 1991-03-27 |