JPS62180936U - - Google Patents
Info
- Publication number
- JPS62180936U JPS62180936U JP1986069468U JP6946886U JPS62180936U JP S62180936 U JPS62180936 U JP S62180936U JP 1986069468 U JP1986069468 U JP 1986069468U JP 6946886 U JP6946886 U JP 6946886U JP S62180936 U JPS62180936 U JP S62180936U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- meter
- suppressed
- install
- predetermined value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069468U JPS62180936U (me) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986069468U JPS62180936U (me) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180936U true JPS62180936U (me) | 1987-11-17 |
Family
ID=30910228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986069468U Pending JPS62180936U (me) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180936U (me) |
-
1986
- 1986-05-08 JP JP1986069468U patent/JPS62180936U/ja active Pending
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