JPS62180710U - - Google Patents

Info

Publication number
JPS62180710U
JPS62180710U JP6920486U JP6920486U JPS62180710U JP S62180710 U JPS62180710 U JP S62180710U JP 6920486 U JP6920486 U JP 6920486U JP 6920486 U JP6920486 U JP 6920486U JP S62180710 U JPS62180710 U JP S62180710U
Authority
JP
Japan
Prior art keywords
main body
axis direction
axis
prevention means
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6920486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044168Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6920486U priority Critical patent/JPH044168Y2/ja
Publication of JPS62180710U publication Critical patent/JPS62180710U/ja
Application granted granted Critical
Publication of JPH044168Y2 publication Critical patent/JPH044168Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP6920486U 1986-05-08 1986-05-08 Expired JPH044168Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6920486U JPH044168Y2 (enExample) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6920486U JPH044168Y2 (enExample) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62180710U true JPS62180710U (enExample) 1987-11-17
JPH044168Y2 JPH044168Y2 (enExample) 1992-02-07

Family

ID=30909719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6920486U Expired JPH044168Y2 (enExample) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH044168Y2 (enExample)

Also Published As

Publication number Publication date
JPH044168Y2 (enExample) 1992-02-07

Similar Documents

Publication Publication Date Title
JPS6435310A (en) Multidimensional measuring machine
US6058618A (en) Coordinate measuring machine
US4834353A (en) Linear motor with magnetic bearing preload
CA1280888C (en) Coordinate measuring machine
US5212873A (en) Position-sensing probe
CN106895773A (zh) 一种超精密测量平台
JPS62180710U (enExample)
JPS6237514A (ja) 静圧軸受装置
JPH0618007B2 (ja) 非接触駆動形平面移動台
JPS60127932A (ja) Ｘｙステ−ジ
JPS62167111U (enExample)
JP2665740B2 (ja) 流体軸受装置
JPH0421051Y2 (enExample)
JPS6234673Y2 (enExample)
JPS62265519A (ja) 三次元測定機
JPH0421052Y2 (enExample)
JPS62167112U (enExample)
JPH0421050Y2 (enExample)
KR19990050902A (ko) 예비 베어링을 갖는 자기 베어링 모듈
SU1119902A1 (ru) Устройство дл обнаружени движущегос по рельсам объекта
FI874092A0 (fi) Reglerbart styrorgan foer roerliga banor eller vaevnader.
JPS6481246A (en) Two-axis travel device
JPH07119744A (ja) 案内機構
JPS62182409U (enExample)
JPS61141006U (enExample)