JPS62180655U - - Google Patents
Info
- Publication number
- JPS62180655U JPS62180655U JP5043186U JP5043186U JPS62180655U JP S62180655 U JPS62180655 U JP S62180655U JP 5043186 U JP5043186 U JP 5043186U JP 5043186 U JP5043186 U JP 5043186U JP S62180655 U JPS62180655 U JP S62180655U
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- rack
- gear
- diaphragm
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006200 vaporizer Substances 0.000 claims description 3
Landscapes
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5043186U JPS62180655U (en:Method) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5043186U JPS62180655U (en:Method) | 1986-04-04 | 1986-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180655U true JPS62180655U (en:Method) | 1987-11-16 |
Family
ID=30873785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5043186U Pending JPS62180655U (en:Method) | 1986-04-04 | 1986-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180655U (en:Method) |
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1986
- 1986-04-04 JP JP5043186U patent/JPS62180655U/ja active Pending