JPS62180065U - - Google Patents

Info

Publication number
JPS62180065U
JPS62180065U JP6697686U JP6697686U JPS62180065U JP S62180065 U JPS62180065 U JP S62180065U JP 6697686 U JP6697686 U JP 6697686U JP 6697686 U JP6697686 U JP 6697686U JP S62180065 U JPS62180065 U JP S62180065U
Authority
JP
Japan
Prior art keywords
sputtering
target
view
perspective
taken along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6697686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6697686U priority Critical patent/JPS62180065U/ja
Publication of JPS62180065U publication Critical patent/JPS62180065U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6697686U 1986-05-06 1986-05-06 Pending JPS62180065U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6697686U JPS62180065U (enrdf_load_stackoverflow) 1986-05-06 1986-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6697686U JPS62180065U (enrdf_load_stackoverflow) 1986-05-06 1986-05-06

Publications (1)

Publication Number Publication Date
JPS62180065U true JPS62180065U (enrdf_load_stackoverflow) 1987-11-16

Family

ID=30905469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6697686U Pending JPS62180065U (enrdf_load_stackoverflow) 1986-05-06 1986-05-06

Country Status (1)

Country Link
JP (1) JPS62180065U (enrdf_load_stackoverflow)

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