JPS62178533U - - Google Patents
Info
- Publication number
- JPS62178533U JPS62178533U JP6724486U JP6724486U JPS62178533U JP S62178533 U JPS62178533 U JP S62178533U JP 6724486 U JP6724486 U JP 6724486U JP 6724486 U JP6724486 U JP 6724486U JP S62178533 U JPS62178533 U JP S62178533U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- bonding
- box
- top cover
- internal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011800 void material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Wire Bonding (AREA)
- Die Bonding (AREA)
Description
第１図は本考案の一実施例の平断面図、第２図
は第１図のＡ―Ａ線に沿う側断面図、第３図は従
来のボンデイング装置のワークマウント部の平断
面図、第４図は第３図のＢ―Ｂ線に沿う側断面図
である。
１……ガイドストツパー、２……ワークマウン
ト部、３……バキユーム孔、４，４ａ……電極板
、５……電極板固定ベース、６……上面カバー、
８……内部導管、９……吹出し口、１０……ボン
デイング作業窓、２０……二重壁カバー、２０ａ
……ボンデイング作業窓、２０ｂ……ボンデイン
グ作業窓、２１……内部カバー、２２……外部カ
バー、２３……空隙部、２４……外部導管、２５
……ボンデイングツール、２６……ガス出口。
FIG. 1 is a plan sectional view of an embodiment of the present invention, FIG. 2 is a side sectional view taken along line AA in FIG. FIG. 4 is a side sectional view taken along line BB in FIG. 3. 1... Guide stopper, 2... Work mount section, 3... Vacuum hole, 4, 4a... Electrode plate, 5... Electrode plate fixing base, 6... Top cover,
8... Internal conduit, 9... Air outlet, 10... Bonding work window, 20... Double wall cover, 20a
... bonding work window, 20b ... bonding work window, 21 ... internal cover, 22 ... external cover, 23 ... void, 24 ... external conduit, 25
...Bonding tool, 26...Gas outlet.
Claims (1)
該ワークマウント部の回りのボンデイングエリヤ
を囲むように形成され、かつ中央上方にボンデイ
ング作業窓を有する箱型の上面カバーと、該上面
カバーの側壁を貫いて先端がボンデイングエリヤ
に開口する雰囲気供給用内部導管８とを備えるタ
イプのボンデイング装置において、前記箱型の上
面カバーを内部カバー２１と外部カバー２２とで
構成される二重壁カバー２０となし、該内部カバ
ー２１と外部カバー２２との間に形成された空隙
部２３に、不活性ガス等を供給するための外部導
管２４を連結するとともに上記内部カバー２１及
び外部カバー２２のボンデイング作業窓２０ａ、
２０ｂ周縁間にガスカーテンを形成させるための
ガス出口２６を設けたことを特徴とするボンデイ
ング装置。 a work mount section 2 on which the work W is placed;
A box-shaped top cover formed to surround the bonding area around the workpiece mount part and having a bonding work window at the upper center; and a box-shaped top cover that penetrates the side wall of the top cover and has a tip opening into the bonding area for supplying an atmosphere. In a type of bonding apparatus equipped with an internal conduit 8, the box-shaped top cover is a double-walled cover 20 consisting of an internal cover 21 and an external cover 22, and between the internal cover 21 and external cover 22, An external conduit 24 for supplying inert gas or the like is connected to the void 23 formed in the gap 23, and a bonding work window 20a of the inner cover 21 and outer cover 22 is connected.
A bonding apparatus characterized in that a gas outlet 26 is provided for forming a gas curtain between the peripheral edges of 20b.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6724486U JPS62178533U (en) | 1986-05-02 | 1986-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6724486U JPS62178533U (en) | 1986-05-02 | 1986-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62178533U true JPS62178533U (en) | 1987-11-12 |
Family
ID=30905968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6724486U Pending JPS62178533U (en) | 1986-05-02 | 1986-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62178533U (en) |
-
1986
- 1986-05-02 JP JP6724486U patent/JPS62178533U/ja active Pending